2/6/2013	7:40:19 AM	Helium valve closed
2/6/2013	7:40:19 AM	H2 valve closed
2/6/2013	7:40:19 AM	BCl3 valve closed
2/6/2013	7:40:19 AM	PH3 valve closed
2/6/2013	7:40:19 AM	SiCl4 pre valve closed
2/6/2013	7:40:19 AM	SiCl4 post valve closed
2/6/2013	7:40:19 AM	Main Vac valve closed
2/6/2013	7:40:19 AM	Bypass valve closed
2/6/2013	7:40:19 AM	Bubbler valve closed
2/6/2013	7:40:19 AM	Helium MFC set to  0.000000
2/6/2013	7:40:19 AM	H2 MFC set to  0.000000
2/6/2013	7:40:19 AM	BCl3 MFC set to  0.000000
2/6/2013	7:40:19 AM	PH3 MFC set to  0.000000
2/6/2013	7:40:19 AM	SiCl4 MFC set to  0.000000
2/6/2013	7:40:19 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	7:40:19 AM	Tube furnace set to 0
2/6/2013	7:40:22 AM	Helium valve closed
2/6/2013	7:40:22 AM	BCl3 valve closed
2/6/2013	7:40:22 AM	PH3 valve closed
2/6/2013	7:40:22 AM	SiCl4 pre valve closed
2/6/2013	7:40:22 AM	SiCl4 post valve closed
2/6/2013	7:40:22 AM	Main Vac valve closed
2/6/2013	7:40:22 AM	Bypass valve closed
2/6/2013	7:40:22 AM	Bubbler valve closed
2/6/2013	7:40:22 AM	H2 valve opened
2/6/2013	7:40:22 AM	Helium MFC set to  0.000000
2/6/2013	7:40:22 AM	H2 MFC set to  500.000000
2/6/2013	7:40:22 AM	BCl3 MFC set to  0.000000
2/6/2013	7:40:22 AM	PH3 MFC set to  0.000000
2/6/2013	7:40:22 AM	SiCl4 MFC set to  0.000000
2/6/2013	7:40:22 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	7:40:22 AM	Tube furnace set to 0
2/6/2013	7:41:38 AM	Helium valve closed
2/6/2013	7:41:38 AM	BCl3 valve closed
2/6/2013	7:41:38 AM	PH3 valve closed
2/6/2013	7:41:38 AM	SiCl4 pre valve closed
2/6/2013	7:41:38 AM	SiCl4 post valve closed
2/6/2013	7:41:38 AM	Main Vac valve closed
2/6/2013	7:41:38 AM	Bypass valve closed
2/6/2013	7:41:38 AM	H2 valve opened
2/6/2013	7:41:38 AM	Bubbler valve opened
2/6/2013	7:41:38 AM	Helium MFC set to  0.000000
2/6/2013	7:41:38 AM	H2 MFC set to  500.000000
2/6/2013	7:41:38 AM	BCl3 MFC set to  0.000000
2/6/2013	7:41:38 AM	PH3 MFC set to  0.000000
2/6/2013	7:41:38 AM	SiCl4 MFC set to  0.000000
2/6/2013	7:41:38 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	7:41:39 AM	Tube furnace set to 0
2/6/2013	7:41:40 AM	Helium valve closed
2/6/2013	7:41:40 AM	BCl3 valve closed
2/6/2013	7:41:40 AM	PH3 valve closed
2/6/2013	7:41:40 AM	SiCl4 pre valve closed
2/6/2013	7:41:40 AM	SiCl4 post valve closed
2/6/2013	7:41:40 AM	Main Vac valve closed
2/6/2013	7:41:40 AM	Bypass valve closed
2/6/2013	7:41:40 AM	H2 valve opened
2/6/2013	7:41:40 AM	Bubbler valve opened
2/6/2013	7:41:40 AM	Helium MFC set to  0.000000
2/6/2013	7:41:40 AM	H2 MFC set to  500.000000
2/6/2013	7:41:40 AM	BCl3 MFC set to  0.000000
2/6/2013	7:41:40 AM	PH3 MFC set to  0.000000
2/6/2013	7:41:40 AM	SiCl4 MFC set to  0.000000
2/6/2013	7:41:40 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	7:41:40 AM	Tube furnace set to 1000
2/6/2013	8:01:40 AM	Helium valve closed
2/6/2013	8:01:40 AM	BCl3 valve closed
2/6/2013	8:01:40 AM	PH3 valve closed
2/6/2013	8:01:40 AM	Main Vac valve closed
2/6/2013	8:01:40 AM	Bypass valve closed
2/6/2013	8:01:40 AM	H2 valve opened
2/6/2013	8:01:40 AM	SiCl4 pre valve opened
2/6/2013	8:01:40 AM	SiCl4 post valve opened
2/6/2013	8:01:40 AM	Bubbler valve opened
2/6/2013	8:01:40 AM	Helium MFC set to  0.000000
2/6/2013	8:01:40 AM	H2 MFC set to  450.000000
2/6/2013	8:01:40 AM	BCl3 MFC set to  0.000000
2/6/2013	8:01:40 AM	PH3 MFC set to  0.000000
2/6/2013	8:01:40 AM	SiCl4 MFC set to  50.000000
2/6/2013	8:01:40 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	8:01:40 AM	Tube furnace set to 1000
2/6/2013	8:41:40 AM	Helium valve closed
2/6/2013	8:41:40 AM	BCl3 valve closed
2/6/2013	8:41:40 AM	PH3 valve closed
2/6/2013	8:41:40 AM	SiCl4 pre valve closed
2/6/2013	8:41:40 AM	SiCl4 post valve closed
2/6/2013	8:41:40 AM	Main Vac valve closed
2/6/2013	8:41:40 AM	Bypass valve closed
2/6/2013	8:41:40 AM	H2 valve opened
2/6/2013	8:41:40 AM	Bubbler valve opened
2/6/2013	8:41:40 AM	Helium MFC set to  0.000000
2/6/2013	8:41:40 AM	H2 MFC set to  500.000000
2/6/2013	8:41:40 AM	BCl3 MFC set to  0.000000
2/6/2013	8:41:40 AM	PH3 MFC set to  0.000000
2/6/2013	8:41:40 AM	SiCl4 MFC set to  0.000000
2/6/2013	8:41:40 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	8:41:40 AM	Tube furnace set to 950
2/6/2013	8:43:40 AM	Helium valve closed
2/6/2013	8:43:40 AM	BCl3 valve closed
2/6/2013	8:43:40 AM	PH3 valve closed
2/6/2013	8:43:40 AM	SiCl4 pre valve closed
2/6/2013	8:43:40 AM	SiCl4 post valve closed
2/6/2013	8:43:40 AM	Main Vac valve closed
2/6/2013	8:43:40 AM	Bypass valve closed
2/6/2013	8:43:40 AM	H2 valve opened
2/6/2013	8:43:40 AM	Bubbler valve opened
2/6/2013	8:43:40 AM	Helium MFC set to  0.000000
2/6/2013	8:43:40 AM	H2 MFC set to  500.000000
2/6/2013	8:43:40 AM	BCl3 MFC set to  0.000000
2/6/2013	8:43:40 AM	PH3 MFC set to  0.000000
2/6/2013	8:43:40 AM	SiCl4 MFC set to  0.000000
2/6/2013	8:43:40 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	8:43:41 AM	Tube furnace set to 900
2/6/2013	8:45:41 AM	Helium valve closed
2/6/2013	8:45:41 AM	BCl3 valve closed
2/6/2013	8:45:41 AM	PH3 valve closed
2/6/2013	8:45:41 AM	SiCl4 pre valve closed
2/6/2013	8:45:41 AM	SiCl4 post valve closed
2/6/2013	8:45:41 AM	Main Vac valve closed
2/6/2013	8:45:41 AM	Bypass valve closed
2/6/2013	8:45:41 AM	H2 valve opened
2/6/2013	8:45:41 AM	Bubbler valve opened
2/6/2013	8:45:41 AM	Helium MFC set to  0.000000
2/6/2013	8:45:41 AM	H2 MFC set to  500.000000
2/6/2013	8:45:41 AM	BCl3 MFC set to  0.000000
2/6/2013	8:45:41 AM	PH3 MFC set to  0.000000
2/6/2013	8:45:41 AM	SiCl4 MFC set to  0.000000
2/6/2013	8:45:41 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	8:45:41 AM	Tube furnace set to 850
2/6/2013	8:47:41 AM	H2 valve closed
2/6/2013	8:47:41 AM	BCl3 valve closed
2/6/2013	8:47:41 AM	PH3 valve closed
2/6/2013	8:47:41 AM	SiCl4 pre valve closed
2/6/2013	8:47:41 AM	SiCl4 post valve closed
2/6/2013	8:47:41 AM	Main Vac valve closed
2/6/2013	8:47:41 AM	Bypass valve closed
2/6/2013	8:47:41 AM	Helium valve opened
2/6/2013	8:47:41 AM	Bubbler valve opened
2/6/2013	8:47:41 AM	Helium MFC set to  500.000000
2/6/2013	8:47:41 AM	H2 MFC set to  0.000000
2/6/2013	8:47:41 AM	BCl3 MFC set to  0.000000
2/6/2013	8:47:41 AM	PH3 MFC set to  0.000000
2/6/2013	8:47:41 AM	SiCl4 MFC set to  0.000000
2/6/2013	8:47:41 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	8:47:41 AM	Tube furnace set to 800
2/6/2013	8:49:41 AM	H2 valve closed
2/6/2013	8:49:41 AM	BCl3 valve closed
2/6/2013	8:49:41 AM	PH3 valve closed
2/6/2013	8:49:41 AM	SiCl4 pre valve closed
2/6/2013	8:49:41 AM	SiCl4 post valve closed
2/6/2013	8:49:41 AM	Main Vac valve closed
2/6/2013	8:49:41 AM	Bypass valve closed
2/6/2013	8:49:41 AM	Helium valve opened
2/6/2013	8:49:41 AM	Bubbler valve opened
2/6/2013	8:49:41 AM	Helium MFC set to  500.000000
2/6/2013	8:49:41 AM	H2 MFC set to  0.000000
2/6/2013	8:49:41 AM	BCl3 MFC set to  0.000000
2/6/2013	8:49:41 AM	PH3 MFC set to  0.000000
2/6/2013	8:49:41 AM	SiCl4 MFC set to  0.000000
2/6/2013	8:49:41 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	8:49:41 AM	Tube furnace set to 750
2/6/2013	8:51:41 AM	H2 valve closed
2/6/2013	8:51:41 AM	BCl3 valve closed
2/6/2013	8:51:41 AM	PH3 valve closed
2/6/2013	8:51:41 AM	SiCl4 pre valve closed
2/6/2013	8:51:41 AM	SiCl4 post valve closed
2/6/2013	8:51:41 AM	Main Vac valve closed
2/6/2013	8:51:41 AM	Bypass valve closed
2/6/2013	8:51:41 AM	Helium valve opened
2/6/2013	8:51:41 AM	Bubbler valve opened
2/6/2013	8:51:41 AM	Helium MFC set to  500.000000
2/6/2013	8:51:41 AM	H2 MFC set to  0.000000
2/6/2013	8:51:41 AM	BCl3 MFC set to  0.000000
2/6/2013	8:51:41 AM	PH3 MFC set to  0.000000
2/6/2013	8:51:41 AM	SiCl4 MFC set to  0.000000
2/6/2013	8:51:41 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	8:51:41 AM	Tube furnace set to 0
2/6/2013	9:11:41 AM	Helium valve closed
2/6/2013	9:11:41 AM	H2 valve closed
2/6/2013	9:11:41 AM	BCl3 valve closed
2/6/2013	9:11:41 AM	PH3 valve closed
2/6/2013	9:11:41 AM	SiCl4 pre valve closed
2/6/2013	9:11:41 AM	SiCl4 post valve closed
2/6/2013	9:11:41 AM	Main Vac valve closed
2/6/2013	9:11:41 AM	Bypass valve closed
2/6/2013	9:11:41 AM	Bubbler valve closed
2/6/2013	9:11:41 AM	Helium MFC set to  0.000000
2/6/2013	9:11:41 AM	H2 MFC set to  0.000000
2/6/2013	9:11:41 AM	BCl3 MFC set to  0.000000
2/6/2013	9:11:41 AM	PH3 MFC set to  0.000000
2/6/2013	9:11:41 AM	SiCl4 MFC set to  0.000000
2/6/2013	9:11:41 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	9:11:42 AM	Tube furnace set to 0
2/6/2013	9:11:43 AM	Helium valve closed
2/6/2013	9:11:43 AM	H2 valve closed
2/6/2013	9:11:43 AM	BCl3 valve closed
2/6/2013	9:11:43 AM	PH3 valve closed
2/6/2013	9:11:43 AM	SiCl4 pre valve closed
2/6/2013	9:11:43 AM	SiCl4 post valve closed
2/6/2013	9:11:43 AM	Main Vac valve closed
2/6/2013	9:11:43 AM	Bubbler valve closed
2/6/2013	9:11:43 AM	Bypass valve opened
2/6/2013	9:11:43 AM	Helium MFC set to  0.000000
2/6/2013	9:11:43 AM	H2 MFC set to  0.000000
2/6/2013	9:11:43 AM	BCl3 MFC set to  0.000000
2/6/2013	9:11:43 AM	PH3 MFC set to  0.000000
2/6/2013	9:11:43 AM	SiCl4 MFC set to  0.000000
2/6/2013	9:11:43 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	9:11:43 AM	Tube furnace set to 0
2/6/2013	9:12:40 AM	Helium valve closed
2/6/2013	9:12:40 AM	H2 valve closed
2/6/2013	9:12:40 AM	BCl3 valve closed
2/6/2013	9:12:40 AM	PH3 valve closed
2/6/2013	9:12:40 AM	SiCl4 pre valve closed
2/6/2013	9:12:40 AM	SiCl4 post valve closed
2/6/2013	9:12:40 AM	Main Vac valve closed
2/6/2013	9:12:40 AM	Bubbler valve closed
2/6/2013	9:12:40 AM	Bypass valve opened
2/6/2013	9:12:40 AM	Helium MFC set to  0.000000
2/6/2013	9:12:40 AM	H2 MFC set to  0.000000
2/6/2013	9:12:40 AM	BCl3 MFC set to  0.000000
2/6/2013	9:12:40 AM	PH3 MFC set to  0.000000
2/6/2013	9:12:40 AM	SiCl4 MFC set to  0.000000
2/6/2013	9:12:40 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	9:12:40 AM	Tube furnace set to 0
2/6/2013	9:13:40 AM	Helium valve closed
2/6/2013	9:13:40 AM	H2 valve closed
2/6/2013	9:13:40 AM	BCl3 valve closed
2/6/2013	9:13:40 AM	PH3 valve closed
2/6/2013	9:13:40 AM	SiCl4 pre valve closed
2/6/2013	9:13:40 AM	SiCl4 post valve closed
2/6/2013	9:13:40 AM	Bypass valve closed
2/6/2013	9:13:40 AM	Bubbler valve closed
2/6/2013	9:13:40 AM	Main Vac valve opened
2/6/2013	9:13:40 AM	Helium MFC set to  0.000000
2/6/2013	9:13:40 AM	H2 MFC set to  0.000000
2/6/2013	9:13:40 AM	BCl3 MFC set to  0.000000
2/6/2013	9:13:40 AM	PH3 MFC set to  0.000000
2/6/2013	9:13:40 AM	SiCl4 MFC set to  0.000000
2/6/2013	9:13:40 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	9:13:40 AM	Tube furnace set to 0
2/6/2013	9:13:41 AM	Run finished at 9:13 AM
2/6/2013	10:17:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/6/2013	10:17:02 AM	Recipe started at 10:17 AM
2/6/2013	10:17:02 AM	Helium valve closed
2/6/2013	10:17:02 AM	H2 valve closed
2/6/2013	10:17:02 AM	BCl3 valve closed
2/6/2013	10:17:02 AM	PH3 valve closed
2/6/2013	10:17:02 AM	SiCl4 pre valve closed
2/6/2013	10:17:02 AM	SiCl4 post valve closed
2/6/2013	10:17:02 AM	Main Vac valve closed
2/6/2013	10:17:02 AM	Bypass valve closed
2/6/2013	10:17:03 AM	Bubbler valve closed
2/6/2013	10:17:03 AM	Helium MFC set to  0.000000
2/6/2013	10:17:03 AM	H2 MFC set to  0.000000
2/6/2013	10:17:03 AM	BCl3 MFC set to  0.000000
2/6/2013	10:17:03 AM	PH3 MFC set to  0.000000
2/6/2013	10:17:03 AM	SiCl4 MFC set to  0.000000
2/6/2013	10:17:03 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	10:17:03 AM	Tube furnace set to 0
2/6/2013	10:17:06 AM	H2 valve closed
2/6/2013	10:17:06 AM	BCl3 valve closed
2/6/2013	10:17:06 AM	PH3 valve closed
2/6/2013	10:17:06 AM	SiCl4 pre valve closed
2/6/2013	10:17:06 AM	SiCl4 post valve closed
2/6/2013	10:17:06 AM	Main Vac valve closed
2/6/2013	10:17:06 AM	Bypass valve closed
2/6/2013	10:17:06 AM	Bubbler valve closed
2/6/2013	10:17:06 AM	Helium valve opened
2/6/2013	10:17:06 AM	Helium MFC set to  500.000000
2/6/2013	10:17:06 AM	H2 MFC set to  0.000000
2/6/2013	10:17:06 AM	BCl3 MFC set to  0.000000
2/6/2013	10:17:06 AM	PH3 MFC set to  0.000000
2/6/2013	10:17:06 AM	SiCl4 MFC set to  0.000000
2/6/2013	10:17:06 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	10:17:06 AM	Tube furnace set to 0
2/6/2013	10:18:15 AM	Helium valve closed
2/6/2013	10:18:15 AM	H2 valve closed
2/6/2013	10:18:15 AM	BCl3 valve closed
2/6/2013	10:18:15 AM	PH3 valve closed
2/6/2013	10:18:15 AM	SiCl4 pre valve closed
2/6/2013	10:18:15 AM	SiCl4 post valve closed
2/6/2013	10:18:15 AM	Main Vac valve closed
2/6/2013	10:18:15 AM	Bypass valve closed
2/6/2013	10:18:15 AM	Bubbler valve closed
2/6/2013	10:18:15 AM	Helium MFC set to  0.000000
2/6/2013	10:18:15 AM	H2 MFC set to  0.000000
2/6/2013	10:18:15 AM	BCl3 MFC set to  0.000000
2/6/2013	10:18:15 AM	PH3 MFC set to  0.000000
2/6/2013	10:18:15 AM	SiCl4 MFC set to  0.000000
2/6/2013	10:18:15 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	10:18:15 AM	Tube furnace set to 0
2/6/2013	10:18:16 AM	Run finished at 10:18 AM
2/6/2013	10:18:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/6/2013	10:24:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/6/2013	10:24:39 AM	Recipe started at 10:24 AM
2/6/2013	10:24:39 AM	Helium valve closed
2/6/2013	10:24:39 AM	H2 valve closed
2/6/2013	10:24:39 AM	BCl3 valve closed
2/6/2013	10:24:39 AM	PH3 valve closed
2/6/2013	10:24:39 AM	SiCl4 pre valve closed
2/6/2013	10:24:39 AM	SiCl4 post valve closed
2/6/2013	10:24:39 AM	Main Vac valve closed
2/6/2013	10:24:39 AM	Bubbler valve closed
2/6/2013	10:24:39 AM	Bypass valve opened
2/6/2013	10:24:39 AM	Helium MFC set to  0.000000
2/6/2013	10:24:39 AM	H2 MFC set to  0.000000
2/6/2013	10:24:39 AM	BCl3 MFC set to  0.000000
2/6/2013	10:24:39 AM	PH3 MFC set to  0.000000
2/6/2013	10:24:39 AM	SiCl4 MFC set to  0.000000
2/6/2013	10:24:39 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	10:24:39 AM	Tube furnace set to 0
2/6/2013	10:25:58 AM	Helium valve closed
2/6/2013	10:25:58 AM	H2 valve closed
2/6/2013	10:25:58 AM	BCl3 valve closed
2/6/2013	10:25:58 AM	PH3 valve closed
2/6/2013	10:25:58 AM	SiCl4 pre valve closed
2/6/2013	10:25:58 AM	SiCl4 post valve closed
2/6/2013	10:25:58 AM	Main Vac valve closed
2/6/2013	10:25:58 AM	Bubbler valve closed
2/6/2013	10:25:58 AM	Bypass valve opened
2/6/2013	10:25:58 AM	Helium MFC set to  0.000000
2/6/2013	10:25:58 AM	H2 MFC set to  0.000000
2/6/2013	10:25:58 AM	BCl3 MFC set to  0.000000
2/6/2013	10:25:58 AM	PH3 MFC set to  0.000000
2/6/2013	10:25:58 AM	SiCl4 MFC set to  0.000000
2/6/2013	10:25:58 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	10:25:58 AM	Tube furnace set to 0
2/6/2013	10:26:58 AM	Helium valve closed
2/6/2013	10:26:58 AM	H2 valve closed
2/6/2013	10:26:58 AM	BCl3 valve closed
2/6/2013	10:26:58 AM	PH3 valve closed
2/6/2013	10:26:58 AM	SiCl4 pre valve closed
2/6/2013	10:26:58 AM	SiCl4 post valve closed
2/6/2013	10:26:58 AM	Bypass valve closed
2/6/2013	10:26:58 AM	Bubbler valve closed
2/6/2013	10:26:58 AM	Main Vac valve opened
2/6/2013	10:26:58 AM	Helium MFC set to  0.000000
2/6/2013	10:26:58 AM	H2 MFC set to  0.000000
2/6/2013	10:26:58 AM	BCl3 MFC set to  0.000000
2/6/2013	10:26:58 AM	PH3 MFC set to  0.000000
2/6/2013	10:26:58 AM	SiCl4 MFC set to  0.000000
2/6/2013	10:26:58 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	10:26:58 AM	Tube furnace set to 0
2/6/2013	10:26:59 AM	Run finished at 10:26 AM
2/6/2013	10:26:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/6/2013	10:34:35 AM	Recipe started at 10:34 AM
2/6/2013	10:34:35 AM	Helium valve closed
2/6/2013	10:34:35 AM	BCl3 valve closed
2/6/2013	10:34:35 AM	PH3 valve closed
2/6/2013	10:34:36 AM	SiCl4 pre valve closed
2/6/2013	10:34:36 AM	SiCl4 post valve closed
2/6/2013	10:34:36 AM	Bypass valve closed
2/6/2013	10:34:36 AM	Bubbler valve closed
2/6/2013	10:34:36 AM	H2 valve opened
2/6/2013	10:34:36 AM	Main Vac valve opened
2/6/2013	10:34:36 AM	Helium MFC set to  0.000000
2/6/2013	10:34:36 AM	H2 MFC set to  0.000000
2/6/2013	10:34:36 AM	BCl3 MFC set to  0.000000
2/6/2013	10:34:36 AM	PH3 MFC set to  0.000000
2/6/2013	10:34:36 AM	SiCl4 MFC set to  0.000000
2/6/2013	10:34:36 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	10:34:36 AM	Tube furnace set to 150
2/6/2013	10:35:06 AM	H2 valve closed
2/6/2013	10:35:06 AM	BCl3 valve closed
2/6/2013	10:35:06 AM	PH3 valve closed
2/6/2013	10:35:06 AM	SiCl4 pre valve closed
2/6/2013	10:35:06 AM	SiCl4 post valve closed
2/6/2013	10:35:06 AM	Bypass valve closed
2/6/2013	10:35:06 AM	Bubbler valve closed
2/6/2013	10:35:06 AM	Helium valve opened
2/6/2013	10:35:06 AM	Main Vac valve opened
2/6/2013	10:35:06 AM	Helium MFC set to  20.000000
2/6/2013	10:35:06 AM	H2 MFC set to  0.000000
2/6/2013	10:35:06 AM	BCl3 MFC set to  0.000000
2/6/2013	10:35:06 AM	PH3 MFC set to  0.000000
2/6/2013	10:35:06 AM	SiCl4 MFC set to  0.000000
2/6/2013	10:35:06 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	10:35:06 AM	Tube furnace set to 150
2/6/2013	10:35:36 AM	Helium valve closed
2/6/2013	10:35:36 AM	H2 valve closed
2/6/2013	10:35:36 AM	BCl3 valve closed
2/6/2013	10:35:36 AM	PH3 valve closed
2/6/2013	10:35:36 AM	SiCl4 pre valve closed
2/6/2013	10:35:36 AM	SiCl4 post valve closed
2/6/2013	10:35:36 AM	Bypass valve closed
2/6/2013	10:35:36 AM	Bubbler valve closed
2/6/2013	10:35:36 AM	Main Vac valve opened
2/6/2013	10:35:36 AM	Helium MFC set to  0.000000
2/6/2013	10:35:36 AM	H2 MFC set to  0.000000
2/6/2013	10:35:36 AM	BCl3 MFC set to  0.000000
2/6/2013	10:35:36 AM	PH3 MFC set to  0.000000
2/6/2013	10:35:36 AM	SiCl4 MFC set to  0.000000
2/6/2013	10:35:36 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	10:35:36 AM	Tube furnace set to 150
2/6/2013	10:36:06 AM	H2 valve closed
2/6/2013	10:36:06 AM	BCl3 valve closed
2/6/2013	10:36:06 AM	PH3 valve closed
2/6/2013	10:36:06 AM	SiCl4 pre valve closed
2/6/2013	10:36:06 AM	SiCl4 post valve closed
2/6/2013	10:36:06 AM	Bypass valve closed
2/6/2013	10:36:06 AM	Bubbler valve closed
2/6/2013	10:36:06 AM	Helium valve opened
2/6/2013	10:36:06 AM	Main Vac valve opened
2/6/2013	10:36:06 AM	Helium MFC set to  20.000000
2/6/2013	10:36:06 AM	H2 MFC set to  0.000000
2/6/2013	10:36:06 AM	BCl3 MFC set to  0.000000
2/6/2013	10:36:06 AM	PH3 MFC set to  0.000000
2/6/2013	10:36:06 AM	SiCl4 MFC set to  0.000000
2/6/2013	10:36:06 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	10:36:06 AM	Tube furnace set to 150
2/6/2013	10:36:36 AM	Helium valve closed
2/6/2013	10:36:36 AM	H2 valve closed
2/6/2013	10:36:36 AM	BCl3 valve closed
2/6/2013	10:36:36 AM	PH3 valve closed
2/6/2013	10:36:37 AM	SiCl4 pre valve closed
2/6/2013	10:36:37 AM	SiCl4 post valve closed
2/6/2013	10:36:37 AM	Bypass valve closed
2/6/2013	10:36:37 AM	Bubbler valve closed
2/6/2013	10:36:37 AM	Main Vac valve opened
2/6/2013	10:36:37 AM	Helium MFC set to  0.000000
2/6/2013	10:36:37 AM	H2 MFC set to  0.000000
2/6/2013	10:36:37 AM	BCl3 MFC set to  0.000000
2/6/2013	10:36:37 AM	PH3 MFC set to  0.000000
2/6/2013	10:36:37 AM	SiCl4 MFC set to  0.000000
2/6/2013	10:36:37 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	10:36:37 AM	Tube furnace set to 150
2/6/2013	10:37:07 AM	H2 valve closed
2/6/2013	10:37:07 AM	BCl3 valve closed
2/6/2013	10:37:07 AM	PH3 valve closed
2/6/2013	10:37:07 AM	SiCl4 pre valve closed
2/6/2013	10:37:07 AM	SiCl4 post valve closed
2/6/2013	10:37:07 AM	Bypass valve closed
2/6/2013	10:37:07 AM	Bubbler valve closed
2/6/2013	10:37:07 AM	Helium valve opened
2/6/2013	10:37:07 AM	Main Vac valve opened
2/6/2013	10:37:07 AM	Helium MFC set to  20.000000
2/6/2013	10:37:07 AM	H2 MFC set to  0.000000
2/6/2013	10:37:07 AM	BCl3 MFC set to  0.000000
2/6/2013	10:37:07 AM	PH3 MFC set to  0.000000
2/6/2013	10:37:07 AM	SiCl4 MFC set to  0.000000
2/6/2013	10:37:07 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	10:37:07 AM	Tube furnace set to 150
2/6/2013	10:39:07 AM	Helium valve closed
2/6/2013	10:39:07 AM	H2 valve closed
2/6/2013	10:39:07 AM	BCl3 valve closed
2/6/2013	10:39:07 AM	PH3 valve closed
2/6/2013	10:39:07 AM	SiCl4 pre valve closed
2/6/2013	10:39:07 AM	SiCl4 post valve closed
2/6/2013	10:39:07 AM	Bypass valve closed
2/6/2013	10:39:07 AM	Bubbler valve closed
2/6/2013	10:39:07 AM	Main Vac valve opened
2/6/2013	10:39:07 AM	Helium MFC set to  0.000000
2/6/2013	10:39:07 AM	H2 MFC set to  0.000000
2/6/2013	10:39:07 AM	BCl3 MFC set to  0.000000
2/6/2013	10:39:07 AM	PH3 MFC set to  0.000000
2/6/2013	10:39:07 AM	SiCl4 MFC set to  0.000000
2/6/2013	10:39:07 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	10:39:07 AM	Tube furnace set to 150
2/6/2013	10:39:37 AM	H2 valve closed
2/6/2013	10:39:37 AM	BCl3 valve closed
2/6/2013	10:39:37 AM	PH3 valve closed
2/6/2013	10:39:37 AM	SiCl4 pre valve closed
2/6/2013	10:39:37 AM	SiCl4 post valve closed
2/6/2013	10:39:37 AM	Bypass valve closed
2/6/2013	10:39:37 AM	Bubbler valve closed
2/6/2013	10:39:37 AM	Helium valve opened
2/6/2013	10:39:37 AM	Main Vac valve opened
2/6/2013	10:39:37 AM	Helium MFC set to  20.000000
2/6/2013	10:39:37 AM	H2 MFC set to  0.000000
2/6/2013	10:39:37 AM	BCl3 MFC set to  0.000000
2/6/2013	10:39:37 AM	PH3 MFC set to  0.000000
2/6/2013	10:39:37 AM	SiCl4 MFC set to  0.000000
2/6/2013	10:39:37 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	10:39:37 AM	Tube furnace set to 150
2/6/2013	10:40:07 AM	Helium valve closed
2/6/2013	10:40:07 AM	H2 valve closed
2/6/2013	10:40:07 AM	BCl3 valve closed
2/6/2013	10:40:07 AM	PH3 valve closed
2/6/2013	10:40:08 AM	SiCl4 pre valve closed
2/6/2013	10:40:08 AM	SiCl4 post valve closed
2/6/2013	10:40:08 AM	Bypass valve closed
2/6/2013	10:40:08 AM	Bubbler valve closed
2/6/2013	10:40:08 AM	Main Vac valve opened
2/6/2013	10:40:08 AM	Helium MFC set to  0.000000
2/6/2013	10:40:08 AM	H2 MFC set to  0.000000
2/6/2013	10:40:08 AM	BCl3 MFC set to  0.000000
2/6/2013	10:40:08 AM	PH3 MFC set to  0.000000
2/6/2013	10:40:08 AM	SiCl4 MFC set to  0.000000
2/6/2013	10:40:08 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	10:40:08 AM	Tube furnace set to 150
2/6/2013	10:40:38 AM	H2 valve closed
2/6/2013	10:40:38 AM	BCl3 valve closed
2/6/2013	10:40:38 AM	PH3 valve closed
2/6/2013	10:40:38 AM	SiCl4 pre valve closed
2/6/2013	10:40:38 AM	SiCl4 post valve closed
2/6/2013	10:40:38 AM	Bypass valve closed
2/6/2013	10:40:38 AM	Bubbler valve closed
2/6/2013	10:40:38 AM	Helium valve opened
2/6/2013	10:40:38 AM	Main Vac valve opened
2/6/2013	10:40:38 AM	Helium MFC set to  20.000000
2/6/2013	10:40:38 AM	H2 MFC set to  0.000000
2/6/2013	10:40:38 AM	BCl3 MFC set to  0.000000
2/6/2013	10:40:38 AM	PH3 MFC set to  0.000000
2/6/2013	10:40:38 AM	SiCl4 MFC set to  0.000000
2/6/2013	10:40:38 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	10:40:38 AM	Tube furnace set to 150
2/6/2013	10:41:08 AM	Helium valve closed
2/6/2013	10:41:08 AM	H2 valve closed
2/6/2013	10:41:08 AM	BCl3 valve closed
2/6/2013	10:41:08 AM	PH3 valve closed
2/6/2013	10:41:08 AM	SiCl4 pre valve closed
2/6/2013	10:41:08 AM	SiCl4 post valve closed
2/6/2013	10:41:08 AM	Bypass valve closed
2/6/2013	10:41:08 AM	Bubbler valve closed
2/6/2013	10:41:08 AM	Main Vac valve opened
2/6/2013	10:41:08 AM	Helium MFC set to  0.000000
2/6/2013	10:41:08 AM	H2 MFC set to  0.000000
2/6/2013	10:41:08 AM	BCl3 MFC set to  0.000000
2/6/2013	10:41:08 AM	PH3 MFC set to  0.000000
2/6/2013	10:41:08 AM	SiCl4 MFC set to  0.000000
2/6/2013	10:41:08 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	10:41:08 AM	Tube furnace set to 150
2/6/2013	10:41:38 AM	H2 valve closed
2/6/2013	10:41:38 AM	BCl3 valve closed
2/6/2013	10:41:38 AM	PH3 valve closed
2/6/2013	10:41:38 AM	SiCl4 pre valve closed
2/6/2013	10:41:38 AM	SiCl4 post valve closed
2/6/2013	10:41:38 AM	Bypass valve closed
2/6/2013	10:41:38 AM	Bubbler valve closed
2/6/2013	10:41:38 AM	Helium valve opened
2/6/2013	10:41:38 AM	Main Vac valve opened
2/6/2013	10:41:38 AM	Helium MFC set to  20.000000
2/6/2013	10:41:38 AM	H2 MFC set to  0.000000
2/6/2013	10:41:38 AM	BCl3 MFC set to  0.000000
2/6/2013	10:41:38 AM	PH3 MFC set to  0.000000
2/6/2013	10:41:38 AM	SiCl4 MFC set to  0.000000
2/6/2013	10:41:38 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	10:41:38 AM	Tube furnace set to 150
2/6/2013	10:43:38 AM	Helium valve closed
2/6/2013	10:43:38 AM	H2 valve closed
2/6/2013	10:43:38 AM	BCl3 valve closed
2/6/2013	10:43:38 AM	PH3 valve closed
2/6/2013	10:43:39 AM	SiCl4 pre valve closed
2/6/2013	10:43:39 AM	SiCl4 post valve closed
2/6/2013	10:43:39 AM	Bypass valve closed
2/6/2013	10:43:39 AM	Bubbler valve closed
2/6/2013	10:43:39 AM	Main Vac valve opened
2/6/2013	10:43:39 AM	Helium MFC set to  0.000000
2/6/2013	10:43:39 AM	H2 MFC set to  0.000000
2/6/2013	10:43:39 AM	BCl3 MFC set to  0.000000
2/6/2013	10:43:39 AM	PH3 MFC set to  0.000000
2/6/2013	10:43:39 AM	SiCl4 MFC set to  0.000000
2/6/2013	10:43:39 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	10:43:39 AM	Tube furnace set to 150
2/6/2013	10:44:09 AM	H2 valve closed
2/6/2013	10:44:09 AM	BCl3 valve closed
2/6/2013	10:44:09 AM	PH3 valve closed
2/6/2013	10:44:09 AM	SiCl4 pre valve closed
2/6/2013	10:44:09 AM	SiCl4 post valve closed
2/6/2013	10:44:09 AM	Bypass valve closed
2/6/2013	10:44:09 AM	Bubbler valve closed
2/6/2013	10:44:09 AM	Helium valve opened
2/6/2013	10:44:09 AM	Main Vac valve opened
2/6/2013	10:44:09 AM	Helium MFC set to  20.000000
2/6/2013	10:44:09 AM	H2 MFC set to  0.000000
2/6/2013	10:44:09 AM	BCl3 MFC set to  0.000000
2/6/2013	10:44:09 AM	PH3 MFC set to  0.000000
2/6/2013	10:44:09 AM	SiCl4 MFC set to  0.000000
2/6/2013	10:44:09 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	10:44:09 AM	Tube furnace set to 150
2/6/2013	10:44:39 AM	Helium valve closed
2/6/2013	10:44:39 AM	H2 valve closed
2/6/2013	10:44:39 AM	BCl3 valve closed
2/6/2013	10:44:39 AM	PH3 valve closed
2/6/2013	10:44:39 AM	SiCl4 pre valve closed
2/6/2013	10:44:39 AM	SiCl4 post valve closed
2/6/2013	10:44:39 AM	Bypass valve closed
2/6/2013	10:44:39 AM	Bubbler valve closed
2/6/2013	10:44:39 AM	Main Vac valve opened
2/6/2013	10:44:39 AM	Helium MFC set to  0.000000
2/6/2013	10:44:39 AM	H2 MFC set to  0.000000
2/6/2013	10:44:39 AM	BCl3 MFC set to  0.000000
2/6/2013	10:44:39 AM	PH3 MFC set to  0.000000
2/6/2013	10:44:39 AM	SiCl4 MFC set to  0.000000
2/6/2013	10:44:39 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	10:44:39 AM	Tube furnace set to 150
2/6/2013	10:45:09 AM	H2 valve closed
2/6/2013	10:45:09 AM	BCl3 valve closed
2/6/2013	10:45:09 AM	PH3 valve closed
2/6/2013	10:45:09 AM	SiCl4 pre valve closed
2/6/2013	10:45:09 AM	SiCl4 post valve closed
2/6/2013	10:45:09 AM	Bypass valve closed
2/6/2013	10:45:09 AM	Bubbler valve closed
2/6/2013	10:45:09 AM	Helium valve opened
2/6/2013	10:45:09 AM	Main Vac valve opened
2/6/2013	10:45:09 AM	Helium MFC set to  20.000000
2/6/2013	10:45:09 AM	H2 MFC set to  0.000000
2/6/2013	10:45:09 AM	BCl3 MFC set to  0.000000
2/6/2013	10:45:09 AM	PH3 MFC set to  0.000000
2/6/2013	10:45:09 AM	SiCl4 MFC set to  0.000000
2/6/2013	10:45:09 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	10:45:09 AM	Tube furnace set to 150
2/6/2013	10:47:09 AM	Helium valve closed
2/6/2013	10:47:09 AM	H2 valve closed
2/6/2013	10:47:09 AM	BCl3 valve closed
2/6/2013	10:47:10 AM	PH3 valve closed
2/6/2013	10:47:10 AM	SiCl4 pre valve closed
2/6/2013	10:47:10 AM	SiCl4 post valve closed
2/6/2013	10:47:10 AM	Bypass valve closed
2/6/2013	10:47:10 AM	Bubbler valve closed
2/6/2013	10:47:10 AM	Main Vac valve opened
2/6/2013	10:47:10 AM	Helium MFC set to  0.000000
2/6/2013	10:47:10 AM	H2 MFC set to  0.000000
2/6/2013	10:47:10 AM	BCl3 MFC set to  0.000000
2/6/2013	10:47:10 AM	PH3 MFC set to  0.000000
2/6/2013	10:47:10 AM	SiCl4 MFC set to  0.000000
2/6/2013	10:47:10 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	10:47:10 AM	Tube furnace set to 150
2/6/2013	10:47:40 AM	H2 valve closed
2/6/2013	10:47:40 AM	BCl3 valve closed
2/6/2013	10:47:40 AM	PH3 valve closed
2/6/2013	10:47:40 AM	SiCl4 pre valve closed
2/6/2013	10:47:40 AM	SiCl4 post valve closed
2/6/2013	10:47:40 AM	Bypass valve closed
2/6/2013	10:47:40 AM	Bubbler valve closed
2/6/2013	10:47:40 AM	Helium valve opened
2/6/2013	10:47:40 AM	Main Vac valve opened
2/6/2013	10:47:40 AM	Helium MFC set to  20.000000
2/6/2013	10:47:40 AM	H2 MFC set to  0.000000
2/6/2013	10:47:40 AM	BCl3 MFC set to  0.000000
2/6/2013	10:47:40 AM	PH3 MFC set to  0.000000
2/6/2013	10:47:40 AM	SiCl4 MFC set to  0.000000
2/6/2013	10:47:40 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	10:47:40 AM	Tube furnace set to 150
2/6/2013	10:48:10 AM	Helium valve closed
2/6/2013	10:48:10 AM	H2 valve closed
2/6/2013	10:48:10 AM	BCl3 valve closed
2/6/2013	10:48:10 AM	PH3 valve closed
2/6/2013	10:48:10 AM	SiCl4 pre valve closed
2/6/2013	10:48:10 AM	SiCl4 post valve closed
2/6/2013	10:48:10 AM	Bypass valve closed
2/6/2013	10:48:10 AM	Bubbler valve closed
2/6/2013	10:48:10 AM	Main Vac valve opened
2/6/2013	10:48:10 AM	Helium MFC set to  0.000000
2/6/2013	10:48:10 AM	H2 MFC set to  0.000000
2/6/2013	10:48:10 AM	BCl3 MFC set to  0.000000
2/6/2013	10:48:10 AM	PH3 MFC set to  0.000000
2/6/2013	10:48:10 AM	SiCl4 MFC set to  0.000000
2/6/2013	10:48:10 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	10:48:10 AM	Tube furnace set to 150
2/6/2013	10:48:40 AM	H2 valve closed
2/6/2013	10:48:40 AM	BCl3 valve closed
2/6/2013	10:48:40 AM	PH3 valve closed
2/6/2013	10:48:40 AM	SiCl4 pre valve closed
2/6/2013	10:48:40 AM	SiCl4 post valve closed
2/6/2013	10:48:40 AM	Bypass valve closed
2/6/2013	10:48:40 AM	Bubbler valve closed
2/6/2013	10:48:40 AM	Helium valve opened
2/6/2013	10:48:40 AM	Main Vac valve opened
2/6/2013	10:48:40 AM	Helium MFC set to  20.000000
2/6/2013	10:48:40 AM	H2 MFC set to  0.000000
2/6/2013	10:48:40 AM	BCl3 MFC set to  0.000000
2/6/2013	10:48:40 AM	PH3 MFC set to  0.000000
2/6/2013	10:48:40 AM	SiCl4 MFC set to  0.000000
2/6/2013	10:48:40 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	10:48:40 AM	Tube furnace set to 150
2/6/2013	10:50:40 AM	Helium valve closed
2/6/2013	10:50:40 AM	H2 valve closed
2/6/2013	10:50:41 AM	BCl3 valve closed
2/6/2013	10:50:41 AM	PH3 valve closed
2/6/2013	10:50:41 AM	SiCl4 pre valve closed
2/6/2013	10:50:41 AM	SiCl4 post valve closed
2/6/2013	10:50:41 AM	Bypass valve closed
2/6/2013	10:50:41 AM	Bubbler valve closed
2/6/2013	10:50:41 AM	Main Vac valve opened
2/6/2013	10:50:41 AM	Helium MFC set to  0.000000
2/6/2013	10:50:41 AM	H2 MFC set to  0.000000
2/6/2013	10:50:41 AM	BCl3 MFC set to  0.000000
2/6/2013	10:50:41 AM	PH3 MFC set to  0.000000
2/6/2013	10:50:41 AM	SiCl4 MFC set to  0.000000
2/6/2013	10:50:41 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	10:50:41 AM	Tube furnace set to 150
2/6/2013	10:50:42 AM	Run finished at 10:50 AM
2/6/2013	11:11:34 AM	Recipe started at 11:11 AM
2/6/2013	11:11:34 AM	Helium valve closed
2/6/2013	11:11:34 AM	H2 valve closed
2/6/2013	11:11:34 AM	BCl3 valve closed
2/6/2013	11:11:34 AM	PH3 valve closed
2/6/2013	11:11:34 AM	SiCl4 pre valve closed
2/6/2013	11:11:34 AM	SiCl4 post valve closed
2/6/2013	11:11:34 AM	Main Vac valve closed
2/6/2013	11:11:34 AM	Bypass valve closed
2/6/2013	11:11:34 AM	Bubbler valve closed
2/6/2013	11:11:34 AM	Helium MFC set to  0.000000
2/6/2013	11:11:34 AM	H2 MFC set to  0.000000
2/6/2013	11:11:34 AM	BCl3 MFC set to  0.000000
2/6/2013	11:11:34 AM	PH3 MFC set to  0.000000
2/6/2013	11:11:34 AM	SiCl4 MFC set to  0.000000
2/6/2013	11:11:34 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	11:11:34 AM	Tube furnace set to 0
2/6/2013	11:11:37 AM	Helium valve closed
2/6/2013	11:11:37 AM	BCl3 valve closed
2/6/2013	11:11:37 AM	PH3 valve closed
2/6/2013	11:11:37 AM	SiCl4 pre valve closed
2/6/2013	11:11:37 AM	SiCl4 post valve closed
2/6/2013	11:11:37 AM	Main Vac valve closed
2/6/2013	11:11:37 AM	Bypass valve closed
2/6/2013	11:11:37 AM	Bubbler valve closed
2/6/2013	11:11:37 AM	H2 valve opened
2/6/2013	11:11:37 AM	Helium MFC set to  0.000000
2/6/2013	11:11:37 AM	H2 MFC set to  500.000000
2/6/2013	11:11:37 AM	BCl3 MFC set to  0.000000
2/6/2013	11:11:37 AM	PH3 MFC set to  0.000000
2/6/2013	11:11:37 AM	SiCl4 MFC set to  0.000000
2/6/2013	11:11:37 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	11:11:37 AM	Tube furnace set to 0
2/6/2013	11:12:50 AM	Helium valve closed
2/6/2013	11:12:50 AM	BCl3 valve closed
2/6/2013	11:12:50 AM	PH3 valve closed
2/6/2013	11:12:50 AM	SiCl4 pre valve closed
2/6/2013	11:12:50 AM	SiCl4 post valve closed
2/6/2013	11:12:50 AM	Main Vac valve closed
2/6/2013	11:12:50 AM	Bypass valve closed
2/6/2013	11:12:50 AM	H2 valve opened
2/6/2013	11:12:50 AM	Bubbler valve opened
2/6/2013	11:12:50 AM	Helium MFC set to  0.000000
2/6/2013	11:12:50 AM	H2 MFC set to  500.000000
2/6/2013	11:12:50 AM	BCl3 MFC set to  0.000000
2/6/2013	11:12:50 AM	PH3 MFC set to  0.000000
2/6/2013	11:12:50 AM	SiCl4 MFC set to  0.000000
2/6/2013	11:12:50 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	11:12:50 AM	Tube furnace set to 0
2/6/2013	11:12:51 AM	Helium valve closed
2/6/2013	11:12:51 AM	BCl3 valve closed
2/6/2013	11:12:51 AM	PH3 valve closed
2/6/2013	11:12:51 AM	SiCl4 pre valve closed
2/6/2013	11:12:51 AM	SiCl4 post valve closed
2/6/2013	11:12:51 AM	Main Vac valve closed
2/6/2013	11:12:51 AM	Bypass valve closed
2/6/2013	11:12:51 AM	H2 valve opened
2/6/2013	11:12:51 AM	Bubbler valve opened
2/6/2013	11:12:51 AM	Helium MFC set to  0.000000
2/6/2013	11:12:51 AM	H2 MFC set to  500.000000
2/6/2013	11:12:51 AM	BCl3 MFC set to  0.000000
2/6/2013	11:12:51 AM	PH3 MFC set to  0.000000
2/6/2013	11:12:51 AM	SiCl4 MFC set to  0.000000
2/6/2013	11:12:51 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	11:12:52 AM	Tube furnace set to 1000
2/6/2013	11:32:52 AM	Helium valve closed
2/6/2013	11:32:52 AM	BCl3 valve closed
2/6/2013	11:32:52 AM	Main Vac valve closed
2/6/2013	11:32:52 AM	Bypass valve closed
2/6/2013	11:32:52 AM	H2 valve opened
2/6/2013	11:32:52 AM	PH3 valve opened
2/6/2013	11:32:52 AM	SiCl4 pre valve opened
2/6/2013	11:32:52 AM	SiCl4 post valve opened
2/6/2013	11:32:52 AM	Bubbler valve opened
2/6/2013	11:32:52 AM	Helium MFC set to  0.000000
2/6/2013	11:32:52 AM	H2 MFC set to  450.000000
2/6/2013	11:32:52 AM	BCl3 MFC set to  0.000000
2/6/2013	11:32:52 AM	PH3 MFC set to  0.050000
2/6/2013	11:32:52 AM	SiCl4 MFC set to  50.000000
2/6/2013	11:32:52 AM	Bypass solenoid MFC set to  0.000000
2/6/2013	11:32:52 AM	Tube furnace set to 1000
2/6/2013	12:12:52 PM	Helium valve closed
2/6/2013	12:12:52 PM	BCl3 valve closed
2/6/2013	12:12:52 PM	PH3 valve closed
2/6/2013	12:12:52 PM	SiCl4 pre valve closed
2/6/2013	12:12:52 PM	SiCl4 post valve closed
2/6/2013	12:12:52 PM	Main Vac valve closed
2/6/2013	12:12:52 PM	Bypass valve closed
2/6/2013	12:12:52 PM	H2 valve opened
2/6/2013	12:12:52 PM	Bubbler valve opened
2/6/2013	12:12:52 PM	Helium MFC set to  0.000000
2/6/2013	12:12:52 PM	H2 MFC set to  500.000000
2/6/2013	12:12:52 PM	BCl3 MFC set to  0.000000
2/6/2013	12:12:52 PM	PH3 MFC set to  0.000000
2/6/2013	12:12:52 PM	SiCl4 MFC set to  0.000000
2/6/2013	12:12:52 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	12:12:52 PM	Tube furnace set to 950
2/6/2013	12:14:52 PM	Helium valve closed
2/6/2013	12:14:52 PM	BCl3 valve closed
2/6/2013	12:14:52 PM	PH3 valve closed
2/6/2013	12:14:52 PM	SiCl4 pre valve closed
2/6/2013	12:14:52 PM	SiCl4 post valve closed
2/6/2013	12:14:52 PM	Main Vac valve closed
2/6/2013	12:14:52 PM	Bypass valve closed
2/6/2013	12:14:52 PM	H2 valve opened
2/6/2013	12:14:52 PM	Bubbler valve opened
2/6/2013	12:14:52 PM	Helium MFC set to  0.000000
2/6/2013	12:14:52 PM	H2 MFC set to  500.000000
2/6/2013	12:14:52 PM	BCl3 MFC set to  0.000000
2/6/2013	12:14:52 PM	PH3 MFC set to  0.000000
2/6/2013	12:14:52 PM	SiCl4 MFC set to  0.000000
2/6/2013	12:14:52 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	12:14:52 PM	Tube furnace set to 900
2/6/2013	12:16:52 PM	Helium valve closed
2/6/2013	12:16:52 PM	BCl3 valve closed
2/6/2013	12:16:52 PM	PH3 valve closed
2/6/2013	12:16:52 PM	SiCl4 pre valve closed
2/6/2013	12:16:52 PM	SiCl4 post valve closed
2/6/2013	12:16:52 PM	Main Vac valve closed
2/6/2013	12:16:52 PM	Bypass valve closed
2/6/2013	12:16:52 PM	H2 valve opened
2/6/2013	12:16:52 PM	Bubbler valve opened
2/6/2013	12:16:52 PM	Helium MFC set to  0.000000
2/6/2013	12:16:52 PM	H2 MFC set to  500.000000
2/6/2013	12:16:52 PM	BCl3 MFC set to  0.000000
2/6/2013	12:16:52 PM	PH3 MFC set to  0.000000
2/6/2013	12:16:52 PM	SiCl4 MFC set to  0.000000
2/6/2013	12:16:52 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	12:16:52 PM	Tube furnace set to 850
2/6/2013	12:18:52 PM	H2 valve closed
2/6/2013	12:18:52 PM	BCl3 valve closed
2/6/2013	12:18:52 PM	PH3 valve closed
2/6/2013	12:18:52 PM	SiCl4 pre valve closed
2/6/2013	12:18:52 PM	SiCl4 post valve closed
2/6/2013	12:18:52 PM	Main Vac valve closed
2/6/2013	12:18:52 PM	Bypass valve closed
2/6/2013	12:18:52 PM	Helium valve opened
2/6/2013	12:18:52 PM	Bubbler valve opened
2/6/2013	12:18:52 PM	Helium MFC set to  500.000000
2/6/2013	12:18:52 PM	H2 MFC set to  0.000000
2/6/2013	12:18:52 PM	BCl3 MFC set to  0.000000
2/6/2013	12:18:52 PM	PH3 MFC set to  0.000000
2/6/2013	12:18:53 PM	SiCl4 MFC set to  0.000000
2/6/2013	12:18:53 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	12:18:53 PM	Tube furnace set to 800
2/6/2013	12:20:53 PM	H2 valve closed
2/6/2013	12:20:53 PM	BCl3 valve closed
2/6/2013	12:20:53 PM	PH3 valve closed
2/6/2013	12:20:53 PM	SiCl4 pre valve closed
2/6/2013	12:20:53 PM	SiCl4 post valve closed
2/6/2013	12:20:53 PM	Main Vac valve closed
2/6/2013	12:20:53 PM	Bypass valve closed
2/6/2013	12:20:53 PM	Helium valve opened
2/6/2013	12:20:53 PM	Bubbler valve opened
2/6/2013	12:20:53 PM	Helium MFC set to  500.000000
2/6/2013	12:20:53 PM	H2 MFC set to  0.000000
2/6/2013	12:20:53 PM	BCl3 MFC set to  0.000000
2/6/2013	12:20:53 PM	PH3 MFC set to  0.000000
2/6/2013	12:20:53 PM	SiCl4 MFC set to  0.000000
2/6/2013	12:20:53 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	12:20:53 PM	Tube furnace set to 750
2/6/2013	12:22:53 PM	H2 valve closed
2/6/2013	12:22:53 PM	BCl3 valve closed
2/6/2013	12:22:53 PM	PH3 valve closed
2/6/2013	12:22:53 PM	SiCl4 pre valve closed
2/6/2013	12:22:53 PM	SiCl4 post valve closed
2/6/2013	12:22:53 PM	Main Vac valve closed
2/6/2013	12:22:53 PM	Bypass valve closed
2/6/2013	12:22:53 PM	Helium valve opened
2/6/2013	12:22:53 PM	Bubbler valve opened
2/6/2013	12:22:53 PM	Helium MFC set to  500.000000
2/6/2013	12:22:53 PM	H2 MFC set to  0.000000
2/6/2013	12:22:53 PM	BCl3 MFC set to  0.000000
2/6/2013	12:22:53 PM	PH3 MFC set to  0.000000
2/6/2013	12:22:53 PM	SiCl4 MFC set to  0.000000
2/6/2013	12:22:53 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	12:22:53 PM	Tube furnace set to 0
2/6/2013	12:42:53 PM	Helium valve closed
2/6/2013	12:42:53 PM	H2 valve closed
2/6/2013	12:42:53 PM	BCl3 valve closed
2/6/2013	12:42:53 PM	PH3 valve closed
2/6/2013	12:42:53 PM	SiCl4 pre valve closed
2/6/2013	12:42:53 PM	SiCl4 post valve closed
2/6/2013	12:42:53 PM	Main Vac valve closed
2/6/2013	12:42:53 PM	Bypass valve closed
2/6/2013	12:42:53 PM	Bubbler valve closed
2/6/2013	12:42:53 PM	Helium MFC set to  0.000000
2/6/2013	12:42:53 PM	H2 MFC set to  0.000000
2/6/2013	12:42:53 PM	BCl3 MFC set to  0.000000
2/6/2013	12:42:53 PM	PH3 MFC set to  0.000000
2/6/2013	12:42:53 PM	SiCl4 MFC set to  0.000000
2/6/2013	12:42:53 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	12:42:53 PM	Tube furnace set to 0
2/6/2013	12:42:54 PM	Helium valve closed
2/6/2013	12:42:54 PM	H2 valve closed
2/6/2013	12:42:54 PM	BCl3 valve closed
2/6/2013	12:42:54 PM	PH3 valve closed
2/6/2013	12:42:54 PM	SiCl4 pre valve closed
2/6/2013	12:42:54 PM	SiCl4 post valve closed
2/6/2013	12:42:54 PM	Main Vac valve closed
2/6/2013	12:42:54 PM	Bubbler valve closed
2/6/2013	12:42:54 PM	Bypass valve opened
2/6/2013	12:42:54 PM	Helium MFC set to  0.000000
2/6/2013	12:42:54 PM	H2 MFC set to  0.000000
2/6/2013	12:42:54 PM	BCl3 MFC set to  0.000000
2/6/2013	12:42:54 PM	PH3 MFC set to  0.000000
2/6/2013	12:42:54 PM	SiCl4 MFC set to  0.000000
2/6/2013	12:42:54 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	12:42:55 PM	Tube furnace set to 0
2/6/2013	12:43:54 PM	Helium valve closed
2/6/2013	12:43:54 PM	H2 valve closed
2/6/2013	12:43:54 PM	BCl3 valve closed
2/6/2013	12:43:54 PM	PH3 valve closed
2/6/2013	12:43:54 PM	SiCl4 pre valve closed
2/6/2013	12:43:54 PM	SiCl4 post valve closed
2/6/2013	12:43:54 PM	Main Vac valve closed
2/6/2013	12:43:54 PM	Bubbler valve closed
2/6/2013	12:43:54 PM	Bypass valve opened
2/6/2013	12:43:54 PM	Helium MFC set to  0.000000
2/6/2013	12:43:54 PM	H2 MFC set to  0.000000
2/6/2013	12:43:54 PM	BCl3 MFC set to  0.000000
2/6/2013	12:43:54 PM	PH3 MFC set to  0.000000
2/6/2013	12:43:54 PM	SiCl4 MFC set to  0.000000
2/6/2013	12:43:54 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	12:43:54 PM	Tube furnace set to 0
2/6/2013	12:44:54 PM	Helium valve closed
2/6/2013	12:44:54 PM	H2 valve closed
2/6/2013	12:44:54 PM	BCl3 valve closed
2/6/2013	12:44:54 PM	PH3 valve closed
2/6/2013	12:44:54 PM	SiCl4 pre valve closed
2/6/2013	12:44:54 PM	SiCl4 post valve closed
2/6/2013	12:44:54 PM	Bypass valve closed
2/6/2013	12:44:54 PM	Bubbler valve closed
2/6/2013	12:44:54 PM	Main Vac valve opened
2/6/2013	12:44:54 PM	Helium MFC set to  0.000000
2/6/2013	12:44:54 PM	H2 MFC set to  0.000000
2/6/2013	12:44:54 PM	BCl3 MFC set to  0.000000
2/6/2013	12:44:54 PM	PH3 MFC set to  0.000000
2/6/2013	12:44:54 PM	SiCl4 MFC set to  0.000000
2/6/2013	12:44:54 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	12:44:54 PM	Tube furnace set to 0
2/6/2013	12:44:55 PM	Run finished at 12:44 PM
2/6/2013	2:18:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/6/2013	2:18:39 PM	Recipe started at 2:18 PM
2/6/2013	2:18:39 PM	Helium valve closed
2/6/2013	2:18:39 PM	H2 valve closed
2/6/2013	2:18:39 PM	BCl3 valve closed
2/6/2013	2:18:39 PM	PH3 valve closed
2/6/2013	2:18:39 PM	SiCl4 pre valve closed
2/6/2013	2:18:39 PM	SiCl4 post valve closed
2/6/2013	2:18:39 PM	Main Vac valve closed
2/6/2013	2:18:39 PM	Bypass valve closed
2/6/2013	2:18:39 PM	Bubbler valve closed
2/6/2013	2:18:39 PM	Helium MFC set to  0.000000
2/6/2013	2:18:39 PM	H2 MFC set to  0.000000
2/6/2013	2:18:39 PM	BCl3 MFC set to  0.000000
2/6/2013	2:18:39 PM	PH3 MFC set to  0.000000
2/6/2013	2:18:39 PM	SiCl4 MFC set to  0.000000
2/6/2013	2:18:39 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	2:18:39 PM	Tube furnace set to 0
2/6/2013	2:18:42 PM	H2 valve closed
2/6/2013	2:18:42 PM	BCl3 valve closed
2/6/2013	2:18:42 PM	PH3 valve closed
2/6/2013	2:18:42 PM	SiCl4 pre valve closed
2/6/2013	2:18:42 PM	SiCl4 post valve closed
2/6/2013	2:18:42 PM	Main Vac valve closed
2/6/2013	2:18:42 PM	Bypass valve closed
2/6/2013	2:18:42 PM	Bubbler valve closed
2/6/2013	2:18:42 PM	Helium valve opened
2/6/2013	2:18:42 PM	Helium MFC set to  500.000000
2/6/2013	2:18:42 PM	H2 MFC set to  0.000000
2/6/2013	2:18:42 PM	BCl3 MFC set to  0.000000
2/6/2013	2:18:42 PM	PH3 MFC set to  0.000000
2/6/2013	2:18:42 PM	SiCl4 MFC set to  0.000000
2/6/2013	2:18:42 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	2:18:42 PM	Tube furnace set to 0
2/6/2013	2:19:52 PM	Helium valve closed
2/6/2013	2:19:52 PM	H2 valve closed
2/6/2013	2:19:52 PM	BCl3 valve closed
2/6/2013	2:19:52 PM	PH3 valve closed
2/6/2013	2:19:52 PM	SiCl4 pre valve closed
2/6/2013	2:19:52 PM	SiCl4 post valve closed
2/6/2013	2:19:52 PM	Main Vac valve closed
2/6/2013	2:19:52 PM	Bypass valve closed
2/6/2013	2:19:52 PM	Bubbler valve closed
2/6/2013	2:19:52 PM	Helium MFC set to  0.000000
2/6/2013	2:19:52 PM	H2 MFC set to  0.000000
2/6/2013	2:19:52 PM	BCl3 MFC set to  0.000000
2/6/2013	2:19:52 PM	PH3 MFC set to  0.000000
2/6/2013	2:19:52 PM	SiCl4 MFC set to  0.000000
2/6/2013	2:19:52 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	2:19:52 PM	Tube furnace set to 0
2/6/2013	2:19:53 PM	Run finished at 2:19 PM
2/6/2013	2:19:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/6/2013	2:24:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/6/2013	2:24:26 PM	Recipe started at 2:24 PM
2/6/2013	2:24:26 PM	Helium valve closed
2/6/2013	2:24:26 PM	H2 valve closed
2/6/2013	2:24:26 PM	BCl3 valve closed
2/6/2013	2:24:26 PM	PH3 valve closed
2/6/2013	2:24:26 PM	SiCl4 pre valve closed
2/6/2013	2:24:26 PM	SiCl4 post valve closed
2/6/2013	2:24:26 PM	Main Vac valve closed
2/6/2013	2:24:26 PM	Bubbler valve closed
2/6/2013	2:24:26 PM	Bypass valve opened
2/6/2013	2:24:26 PM	Helium MFC set to  0.000000
2/6/2013	2:24:26 PM	H2 MFC set to  0.000000
2/6/2013	2:24:26 PM	BCl3 MFC set to  0.000000
2/6/2013	2:24:26 PM	PH3 MFC set to  0.000000
2/6/2013	2:24:26 PM	SiCl4 MFC set to  0.000000
2/6/2013	2:24:26 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	2:24:26 PM	Tube furnace set to 0
2/6/2013	2:25:43 PM	Helium valve closed
2/6/2013	2:25:43 PM	H2 valve closed
2/6/2013	2:25:43 PM	BCl3 valve closed
2/6/2013	2:25:43 PM	PH3 valve closed
2/6/2013	2:25:43 PM	SiCl4 pre valve closed
2/6/2013	2:25:43 PM	SiCl4 post valve closed
2/6/2013	2:25:43 PM	Main Vac valve closed
2/6/2013	2:25:43 PM	Bubbler valve closed
2/6/2013	2:25:43 PM	Bypass valve opened
2/6/2013	2:25:43 PM	Helium MFC set to  0.000000
2/6/2013	2:25:43 PM	H2 MFC set to  0.000000
2/6/2013	2:25:43 PM	BCl3 MFC set to  0.000000
2/6/2013	2:25:43 PM	PH3 MFC set to  0.000000
2/6/2013	2:25:43 PM	SiCl4 MFC set to  0.000000
2/6/2013	2:25:43 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	2:25:43 PM	Tube furnace set to 0
2/6/2013	2:26:43 PM	Helium valve closed
2/6/2013	2:26:43 PM	H2 valve closed
2/6/2013	2:26:43 PM	BCl3 valve closed
2/6/2013	2:26:43 PM	PH3 valve closed
2/6/2013	2:26:43 PM	SiCl4 pre valve closed
2/6/2013	2:26:43 PM	SiCl4 post valve closed
2/6/2013	2:26:43 PM	Bypass valve closed
2/6/2013	2:26:43 PM	Bubbler valve closed
2/6/2013	2:26:43 PM	Main Vac valve opened
2/6/2013	2:26:43 PM	Helium MFC set to  0.000000
2/6/2013	2:26:43 PM	H2 MFC set to  0.000000
2/6/2013	2:26:43 PM	BCl3 MFC set to  0.000000
2/6/2013	2:26:43 PM	PH3 MFC set to  0.000000
2/6/2013	2:26:43 PM	SiCl4 MFC set to  0.000000
2/6/2013	2:26:43 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	2:26:43 PM	Tube furnace set to 0
2/6/2013	2:26:44 PM	Run finished at 2:26 PM
2/6/2013	2:26:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/6/2013	2:38:25 PM	Recipe started at 2:38 PM
2/6/2013	2:38:25 PM	Helium valve closed
2/6/2013	2:38:25 PM	BCl3 valve closed
2/6/2013	2:38:25 PM	PH3 valve closed
2/6/2013	2:38:25 PM	SiCl4 pre valve closed
2/6/2013	2:38:25 PM	SiCl4 post valve closed
2/6/2013	2:38:25 PM	Bypass valve closed
2/6/2013	2:38:25 PM	Bubbler valve closed
2/6/2013	2:38:25 PM	H2 valve opened
2/6/2013	2:38:25 PM	Main Vac valve opened
2/6/2013	2:38:25 PM	Helium MFC set to  0.000000
2/6/2013	2:38:25 PM	H2 MFC set to  0.000000
2/6/2013	2:38:25 PM	BCl3 MFC set to  0.000000
2/6/2013	2:38:25 PM	PH3 MFC set to  0.000000
2/6/2013	2:38:25 PM	SiCl4 MFC set to  0.000000
2/6/2013	2:38:25 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	2:38:25 PM	Tube furnace set to 150
2/6/2013	2:38:55 PM	H2 valve closed
2/6/2013	2:38:55 PM	BCl3 valve closed
2/6/2013	2:38:55 PM	PH3 valve closed
2/6/2013	2:38:55 PM	SiCl4 pre valve closed
2/6/2013	2:38:55 PM	SiCl4 post valve closed
2/6/2013	2:38:55 PM	Bypass valve closed
2/6/2013	2:38:55 PM	Bubbler valve closed
2/6/2013	2:38:55 PM	Helium valve opened
2/6/2013	2:38:55 PM	Main Vac valve opened
2/6/2013	2:38:56 PM	Helium MFC set to  20.000000
2/6/2013	2:38:56 PM	H2 MFC set to  0.000000
2/6/2013	2:38:56 PM	BCl3 MFC set to  0.000000
2/6/2013	2:38:56 PM	PH3 MFC set to  0.000000
2/6/2013	2:38:56 PM	SiCl4 MFC set to  0.000000
2/6/2013	2:38:56 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	2:38:56 PM	Tube furnace set to 150
2/6/2013	2:39:26 PM	Helium valve closed
2/6/2013	2:39:26 PM	H2 valve closed
2/6/2013	2:39:26 PM	BCl3 valve closed
2/6/2013	2:39:26 PM	PH3 valve closed
2/6/2013	2:39:26 PM	SiCl4 pre valve closed
2/6/2013	2:39:26 PM	SiCl4 post valve closed
2/6/2013	2:39:26 PM	Bypass valve closed
2/6/2013	2:39:26 PM	Bubbler valve closed
2/6/2013	2:39:26 PM	Main Vac valve opened
2/6/2013	2:39:26 PM	Helium MFC set to  0.000000
2/6/2013	2:39:26 PM	H2 MFC set to  0.000000
2/6/2013	2:39:26 PM	BCl3 MFC set to  0.000000
2/6/2013	2:39:26 PM	PH3 MFC set to  0.000000
2/6/2013	2:39:26 PM	SiCl4 MFC set to  0.000000
2/6/2013	2:39:26 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	2:39:26 PM	Tube furnace set to 150
2/6/2013	2:39:56 PM	H2 valve closed
2/6/2013	2:39:56 PM	BCl3 valve closed
2/6/2013	2:39:56 PM	PH3 valve closed
2/6/2013	2:39:56 PM	SiCl4 pre valve closed
2/6/2013	2:39:56 PM	SiCl4 post valve closed
2/6/2013	2:39:56 PM	Bypass valve closed
2/6/2013	2:39:56 PM	Bubbler valve closed
2/6/2013	2:39:56 PM	Helium valve opened
2/6/2013	2:39:56 PM	Main Vac valve opened
2/6/2013	2:39:56 PM	Helium MFC set to  20.000000
2/6/2013	2:39:56 PM	H2 MFC set to  0.000000
2/6/2013	2:39:56 PM	BCl3 MFC set to  0.000000
2/6/2013	2:39:56 PM	PH3 MFC set to  0.000000
2/6/2013	2:39:56 PM	SiCl4 MFC set to  0.000000
2/6/2013	2:39:56 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	2:39:56 PM	Tube furnace set to 150
2/6/2013	2:40:26 PM	Helium valve closed
2/6/2013	2:40:26 PM	H2 valve closed
2/6/2013	2:40:26 PM	BCl3 valve closed
2/6/2013	2:40:26 PM	PH3 valve closed
2/6/2013	2:40:26 PM	SiCl4 pre valve closed
2/6/2013	2:40:26 PM	SiCl4 post valve closed
2/6/2013	2:40:26 PM	Bypass valve closed
2/6/2013	2:40:26 PM	Bubbler valve closed
2/6/2013	2:40:26 PM	Main Vac valve opened
2/6/2013	2:40:26 PM	Helium MFC set to  0.000000
2/6/2013	2:40:26 PM	H2 MFC set to  0.000000
2/6/2013	2:40:26 PM	BCl3 MFC set to  0.000000
2/6/2013	2:40:26 PM	PH3 MFC set to  0.000000
2/6/2013	2:40:26 PM	SiCl4 MFC set to  0.000000
2/6/2013	2:40:26 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	2:40:26 PM	Tube furnace set to 150
2/6/2013	2:40:56 PM	H2 valve closed
2/6/2013	2:40:56 PM	BCl3 valve closed
2/6/2013	2:40:56 PM	PH3 valve closed
2/6/2013	2:40:56 PM	SiCl4 pre valve closed
2/6/2013	2:40:56 PM	SiCl4 post valve closed
2/6/2013	2:40:56 PM	Bypass valve closed
2/6/2013	2:40:56 PM	Bubbler valve closed
2/6/2013	2:40:56 PM	Helium valve opened
2/6/2013	2:40:56 PM	Main Vac valve opened
2/6/2013	2:40:57 PM	Helium MFC set to  20.000000
2/6/2013	2:40:57 PM	H2 MFC set to  0.000000
2/6/2013	2:40:57 PM	BCl3 MFC set to  0.000000
2/6/2013	2:40:57 PM	PH3 MFC set to  0.000000
2/6/2013	2:40:57 PM	SiCl4 MFC set to  0.000000
2/6/2013	2:40:57 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	2:40:57 PM	Tube furnace set to 150
2/6/2013	2:42:57 PM	Helium valve closed
2/6/2013	2:42:57 PM	H2 valve closed
2/6/2013	2:42:57 PM	BCl3 valve closed
2/6/2013	2:42:57 PM	PH3 valve closed
2/6/2013	2:42:57 PM	SiCl4 pre valve closed
2/6/2013	2:42:57 PM	SiCl4 post valve closed
2/6/2013	2:42:57 PM	Bypass valve closed
2/6/2013	2:42:57 PM	Bubbler valve closed
2/6/2013	2:42:57 PM	Main Vac valve opened
2/6/2013	2:42:57 PM	Helium MFC set to  0.000000
2/6/2013	2:42:57 PM	H2 MFC set to  0.000000
2/6/2013	2:42:57 PM	BCl3 MFC set to  0.000000
2/6/2013	2:42:57 PM	PH3 MFC set to  0.000000
2/6/2013	2:42:57 PM	SiCl4 MFC set to  0.000000
2/6/2013	2:42:57 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	2:42:57 PM	Tube furnace set to 150
2/6/2013	2:43:27 PM	H2 valve closed
2/6/2013	2:43:27 PM	BCl3 valve closed
2/6/2013	2:43:27 PM	PH3 valve closed
2/6/2013	2:43:27 PM	SiCl4 pre valve closed
2/6/2013	2:43:27 PM	SiCl4 post valve closed
2/6/2013	2:43:27 PM	Bypass valve closed
2/6/2013	2:43:27 PM	Bubbler valve closed
2/6/2013	2:43:27 PM	Helium valve opened
2/6/2013	2:43:27 PM	Main Vac valve opened
2/6/2013	2:43:27 PM	Helium MFC set to  20.000000
2/6/2013	2:43:27 PM	H2 MFC set to  0.000000
2/6/2013	2:43:27 PM	BCl3 MFC set to  0.000000
2/6/2013	2:43:27 PM	PH3 MFC set to  0.000000
2/6/2013	2:43:27 PM	SiCl4 MFC set to  0.000000
2/6/2013	2:43:27 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	2:43:27 PM	Tube furnace set to 150
2/6/2013	2:43:57 PM	Helium valve closed
2/6/2013	2:43:57 PM	H2 valve closed
2/6/2013	2:43:57 PM	BCl3 valve closed
2/6/2013	2:43:57 PM	PH3 valve closed
2/6/2013	2:43:57 PM	SiCl4 pre valve closed
2/6/2013	2:43:57 PM	SiCl4 post valve closed
2/6/2013	2:43:57 PM	Bypass valve closed
2/6/2013	2:43:57 PM	Bubbler valve closed
2/6/2013	2:43:57 PM	Main Vac valve opened
2/6/2013	2:43:57 PM	Helium MFC set to  0.000000
2/6/2013	2:43:57 PM	H2 MFC set to  0.000000
2/6/2013	2:43:57 PM	BCl3 MFC set to  0.000000
2/6/2013	2:43:57 PM	PH3 MFC set to  0.000000
2/6/2013	2:43:57 PM	SiCl4 MFC set to  0.000000
2/6/2013	2:43:57 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	2:43:57 PM	Tube furnace set to 150
2/6/2013	2:44:27 PM	H2 valve closed
2/6/2013	2:44:27 PM	BCl3 valve closed
2/6/2013	2:44:27 PM	PH3 valve closed
2/6/2013	2:44:27 PM	SiCl4 pre valve closed
2/6/2013	2:44:27 PM	SiCl4 post valve closed
2/6/2013	2:44:27 PM	Bypass valve closed
2/6/2013	2:44:27 PM	Bubbler valve closed
2/6/2013	2:44:27 PM	Helium valve opened
2/6/2013	2:44:27 PM	Main Vac valve opened
2/6/2013	2:44:27 PM	Helium MFC set to  20.000000
2/6/2013	2:44:27 PM	H2 MFC set to  0.000000
2/6/2013	2:44:27 PM	BCl3 MFC set to  0.000000
2/6/2013	2:44:27 PM	PH3 MFC set to  0.000000
2/6/2013	2:44:27 PM	SiCl4 MFC set to  0.000000
2/6/2013	2:44:28 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	2:44:28 PM	Tube furnace set to 150
2/6/2013	2:44:58 PM	Helium valve closed
2/6/2013	2:44:58 PM	H2 valve closed
2/6/2013	2:44:58 PM	BCl3 valve closed
2/6/2013	2:44:58 PM	PH3 valve closed
2/6/2013	2:44:58 PM	SiCl4 pre valve closed
2/6/2013	2:44:58 PM	SiCl4 post valve closed
2/6/2013	2:44:58 PM	Bypass valve closed
2/6/2013	2:44:58 PM	Bubbler valve closed
2/6/2013	2:44:58 PM	Main Vac valve opened
2/6/2013	2:44:58 PM	Helium MFC set to  0.000000
2/6/2013	2:44:58 PM	H2 MFC set to  0.000000
2/6/2013	2:44:58 PM	BCl3 MFC set to  0.000000
2/6/2013	2:44:58 PM	PH3 MFC set to  0.000000
2/6/2013	2:44:58 PM	SiCl4 MFC set to  0.000000
2/6/2013	2:44:58 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	2:44:58 PM	Tube furnace set to 150
2/6/2013	2:45:28 PM	H2 valve closed
2/6/2013	2:45:28 PM	BCl3 valve closed
2/6/2013	2:45:28 PM	PH3 valve closed
2/6/2013	2:45:28 PM	SiCl4 pre valve closed
2/6/2013	2:45:28 PM	SiCl4 post valve closed
2/6/2013	2:45:28 PM	Bypass valve closed
2/6/2013	2:45:28 PM	Bubbler valve closed
2/6/2013	2:45:28 PM	Helium valve opened
2/6/2013	2:45:28 PM	Main Vac valve opened
2/6/2013	2:45:28 PM	Helium MFC set to  20.000000
2/6/2013	2:45:28 PM	H2 MFC set to  0.000000
2/6/2013	2:45:28 PM	BCl3 MFC set to  0.000000
2/6/2013	2:45:28 PM	PH3 MFC set to  0.000000
2/6/2013	2:45:28 PM	SiCl4 MFC set to  0.000000
2/6/2013	2:45:28 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	2:45:28 PM	Tube furnace set to 150
2/6/2013	2:47:28 PM	Helium valve closed
2/6/2013	2:47:28 PM	H2 valve closed
2/6/2013	2:47:28 PM	BCl3 valve closed
2/6/2013	2:47:28 PM	PH3 valve closed
2/6/2013	2:47:28 PM	SiCl4 pre valve closed
2/6/2013	2:47:28 PM	SiCl4 post valve closed
2/6/2013	2:47:28 PM	Bypass valve closed
2/6/2013	2:47:28 PM	Bubbler valve closed
2/6/2013	2:47:28 PM	Main Vac valve opened
2/6/2013	2:47:28 PM	Helium MFC set to  0.000000
2/6/2013	2:47:28 PM	H2 MFC set to  0.000000
2/6/2013	2:47:28 PM	BCl3 MFC set to  0.000000
2/6/2013	2:47:28 PM	PH3 MFC set to  0.000000
2/6/2013	2:47:28 PM	SiCl4 MFC set to  0.000000
2/6/2013	2:47:28 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	2:47:28 PM	Tube furnace set to 150
2/6/2013	2:47:58 PM	H2 valve closed
2/6/2013	2:47:58 PM	BCl3 valve closed
2/6/2013	2:47:58 PM	PH3 valve closed
2/6/2013	2:47:58 PM	SiCl4 pre valve closed
2/6/2013	2:47:58 PM	SiCl4 post valve closed
2/6/2013	2:47:58 PM	Bypass valve closed
2/6/2013	2:47:58 PM	Bubbler valve closed
2/6/2013	2:47:58 PM	Helium valve opened
2/6/2013	2:47:58 PM	Main Vac valve opened
2/6/2013	2:47:58 PM	Helium MFC set to  20.000000
2/6/2013	2:47:58 PM	H2 MFC set to  0.000000
2/6/2013	2:47:58 PM	BCl3 MFC set to  0.000000
2/6/2013	2:47:58 PM	PH3 MFC set to  0.000000
2/6/2013	2:47:58 PM	SiCl4 MFC set to  0.000000
2/6/2013	2:47:58 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	2:47:59 PM	Tube furnace set to 150
2/6/2013	2:48:29 PM	Helium valve closed
2/6/2013	2:48:29 PM	H2 valve closed
2/6/2013	2:48:29 PM	BCl3 valve closed
2/6/2013	2:48:29 PM	PH3 valve closed
2/6/2013	2:48:29 PM	SiCl4 pre valve closed
2/6/2013	2:48:29 PM	SiCl4 post valve closed
2/6/2013	2:48:29 PM	Bypass valve closed
2/6/2013	2:48:29 PM	Bubbler valve closed
2/6/2013	2:48:29 PM	Main Vac valve opened
2/6/2013	2:48:29 PM	Helium MFC set to  0.000000
2/6/2013	2:48:29 PM	H2 MFC set to  0.000000
2/6/2013	2:48:29 PM	BCl3 MFC set to  0.000000
2/6/2013	2:48:29 PM	PH3 MFC set to  0.000000
2/6/2013	2:48:29 PM	SiCl4 MFC set to  0.000000
2/6/2013	2:48:29 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	2:48:29 PM	Tube furnace set to 150
2/6/2013	2:48:59 PM	H2 valve closed
2/6/2013	2:48:59 PM	BCl3 valve closed
2/6/2013	2:48:59 PM	PH3 valve closed
2/6/2013	2:48:59 PM	SiCl4 pre valve closed
2/6/2013	2:48:59 PM	SiCl4 post valve closed
2/6/2013	2:48:59 PM	Bypass valve closed
2/6/2013	2:48:59 PM	Bubbler valve closed
2/6/2013	2:48:59 PM	Helium valve opened
2/6/2013	2:48:59 PM	Main Vac valve opened
2/6/2013	2:48:59 PM	Helium MFC set to  20.000000
2/6/2013	2:48:59 PM	H2 MFC set to  0.000000
2/6/2013	2:48:59 PM	BCl3 MFC set to  0.000000
2/6/2013	2:48:59 PM	PH3 MFC set to  0.000000
2/6/2013	2:48:59 PM	SiCl4 MFC set to  0.000000
2/6/2013	2:48:59 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	2:48:59 PM	Tube furnace set to 150
2/6/2013	2:50:59 PM	Helium valve closed
2/6/2013	2:50:59 PM	H2 valve closed
2/6/2013	2:50:59 PM	BCl3 valve closed
2/6/2013	2:50:59 PM	PH3 valve closed
2/6/2013	2:50:59 PM	SiCl4 pre valve closed
2/6/2013	2:50:59 PM	SiCl4 post valve closed
2/6/2013	2:50:59 PM	Bypass valve closed
2/6/2013	2:50:59 PM	Bubbler valve closed
2/6/2013	2:50:59 PM	Main Vac valve opened
2/6/2013	2:50:59 PM	Helium MFC set to  0.000000
2/6/2013	2:50:59 PM	H2 MFC set to  0.000000
2/6/2013	2:50:59 PM	BCl3 MFC set to  0.000000
2/6/2013	2:50:59 PM	PH3 MFC set to  0.000000
2/6/2013	2:50:59 PM	SiCl4 MFC set to  0.000000
2/6/2013	2:50:59 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	2:50:59 PM	Tube furnace set to 150
2/6/2013	2:51:29 PM	H2 valve closed
2/6/2013	2:51:29 PM	BCl3 valve closed
2/6/2013	2:51:29 PM	PH3 valve closed
2/6/2013	2:51:29 PM	SiCl4 pre valve closed
2/6/2013	2:51:29 PM	SiCl4 post valve closed
2/6/2013	2:51:29 PM	Bypass valve closed
2/6/2013	2:51:29 PM	Bubbler valve closed
2/6/2013	2:51:29 PM	Helium valve opened
2/6/2013	2:51:29 PM	Main Vac valve opened
2/6/2013	2:51:29 PM	Helium MFC set to  20.000000
2/6/2013	2:51:29 PM	H2 MFC set to  0.000000
2/6/2013	2:51:29 PM	BCl3 MFC set to  0.000000
2/6/2013	2:51:29 PM	PH3 MFC set to  0.000000
2/6/2013	2:51:29 PM	SiCl4 MFC set to  0.000000
2/6/2013	2:51:29 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	2:51:30 PM	Tube furnace set to 150
2/6/2013	2:52:00 PM	Helium valve closed
2/6/2013	2:52:00 PM	H2 valve closed
2/6/2013	2:52:00 PM	BCl3 valve closed
2/6/2013	2:52:00 PM	PH3 valve closed
2/6/2013	2:52:00 PM	SiCl4 pre valve closed
2/6/2013	2:52:00 PM	SiCl4 post valve closed
2/6/2013	2:52:00 PM	Bypass valve closed
2/6/2013	2:52:00 PM	Bubbler valve closed
2/6/2013	2:52:00 PM	Main Vac valve opened
2/6/2013	2:52:00 PM	Helium MFC set to  0.000000
2/6/2013	2:52:00 PM	H2 MFC set to  0.000000
2/6/2013	2:52:00 PM	BCl3 MFC set to  0.000000
2/6/2013	2:52:00 PM	PH3 MFC set to  0.000000
2/6/2013	2:52:00 PM	SiCl4 MFC set to  0.000000
2/6/2013	2:52:00 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	2:52:00 PM	Tube furnace set to 150
2/6/2013	2:52:30 PM	H2 valve closed
2/6/2013	2:52:30 PM	BCl3 valve closed
2/6/2013	2:52:30 PM	PH3 valve closed
2/6/2013	2:52:30 PM	SiCl4 pre valve closed
2/6/2013	2:52:30 PM	SiCl4 post valve closed
2/6/2013	2:52:30 PM	Bypass valve closed
2/6/2013	2:52:30 PM	Bubbler valve closed
2/6/2013	2:52:30 PM	Helium valve opened
2/6/2013	2:52:30 PM	Main Vac valve opened
2/6/2013	2:52:30 PM	Helium MFC set to  20.000000
2/6/2013	2:52:30 PM	H2 MFC set to  0.000000
2/6/2013	2:52:30 PM	BCl3 MFC set to  0.000000
2/6/2013	2:52:30 PM	PH3 MFC set to  0.000000
2/6/2013	2:52:30 PM	SiCl4 MFC set to  0.000000
2/6/2013	2:52:30 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	2:52:30 PM	Tube furnace set to 150
2/6/2013	2:54:30 PM	Helium valve closed
2/6/2013	2:54:30 PM	H2 valve closed
2/6/2013	2:54:30 PM	BCl3 valve closed
2/6/2013	2:54:30 PM	PH3 valve closed
2/6/2013	2:54:30 PM	SiCl4 pre valve closed
2/6/2013	2:54:30 PM	SiCl4 post valve closed
2/6/2013	2:54:30 PM	Bypass valve closed
2/6/2013	2:54:30 PM	Bubbler valve closed
2/6/2013	2:54:30 PM	Main Vac valve opened
2/6/2013	2:54:30 PM	Helium MFC set to  0.000000
2/6/2013	2:54:30 PM	H2 MFC set to  0.000000
2/6/2013	2:54:30 PM	BCl3 MFC set to  0.000000
2/6/2013	2:54:30 PM	PH3 MFC set to  0.000000
2/6/2013	2:54:30 PM	SiCl4 MFC set to  0.000000
2/6/2013	2:54:30 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	2:54:30 PM	Tube furnace set to 150
2/6/2013	2:54:31 PM	Run finished at 2:54 PM
2/6/2013	3:21:27 PM	Recipe started at 3:21 PM
2/6/2013	3:21:27 PM	Helium valve closed
2/6/2013	3:21:27 PM	H2 valve closed
2/6/2013	3:21:27 PM	BCl3 valve closed
2/6/2013	3:21:27 PM	PH3 valve closed
2/6/2013	3:21:27 PM	SiCl4 pre valve closed
2/6/2013	3:21:27 PM	SiCl4 post valve closed
2/6/2013	3:21:27 PM	Main Vac valve closed
2/6/2013	3:21:27 PM	Bypass valve closed
2/6/2013	3:21:27 PM	Bubbler valve closed
2/6/2013	3:21:27 PM	Helium MFC set to  0.000000
2/6/2013	3:21:27 PM	H2 MFC set to  0.000000
2/6/2013	3:21:27 PM	BCl3 MFC set to  0.000000
2/6/2013	3:21:27 PM	PH3 MFC set to  0.000000
2/6/2013	3:21:27 PM	SiCl4 MFC set to  0.000000
2/6/2013	3:21:27 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	3:21:28 PM	Tube furnace set to 0
2/6/2013	3:21:31 PM	Helium valve closed
2/6/2013	3:21:31 PM	BCl3 valve closed
2/6/2013	3:21:31 PM	PH3 valve closed
2/6/2013	3:21:31 PM	SiCl4 pre valve closed
2/6/2013	3:21:31 PM	SiCl4 post valve closed
2/6/2013	3:21:31 PM	Main Vac valve closed
2/6/2013	3:21:31 PM	Bypass valve closed
2/6/2013	3:21:31 PM	Bubbler valve closed
2/6/2013	3:21:31 PM	H2 valve opened
2/6/2013	3:21:31 PM	Helium MFC set to  0.000000
2/6/2013	3:21:31 PM	H2 MFC set to  500.000000
2/6/2013	3:21:31 PM	BCl3 MFC set to  0.000000
2/6/2013	3:21:31 PM	PH3 MFC set to  0.000000
2/6/2013	3:21:31 PM	SiCl4 MFC set to  0.000000
2/6/2013	3:21:31 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	3:21:31 PM	Tube furnace set to 0
2/6/2013	3:22:44 PM	Helium valve closed
2/6/2013	3:22:44 PM	BCl3 valve closed
2/6/2013	3:22:44 PM	PH3 valve closed
2/6/2013	3:22:44 PM	SiCl4 pre valve closed
2/6/2013	3:22:44 PM	SiCl4 post valve closed
2/6/2013	3:22:44 PM	Main Vac valve closed
2/6/2013	3:22:44 PM	Bypass valve closed
2/6/2013	3:22:44 PM	H2 valve opened
2/6/2013	3:22:44 PM	Bubbler valve opened
2/6/2013	3:22:44 PM	Helium MFC set to  0.000000
2/6/2013	3:22:44 PM	H2 MFC set to  500.000000
2/6/2013	3:22:44 PM	BCl3 MFC set to  0.000000
2/6/2013	3:22:44 PM	PH3 MFC set to  0.000000
2/6/2013	3:22:44 PM	SiCl4 MFC set to  0.000000
2/6/2013	3:22:44 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	3:22:44 PM	Tube furnace set to 0
2/6/2013	3:22:45 PM	Helium valve closed
2/6/2013	3:22:45 PM	BCl3 valve closed
2/6/2013	3:22:45 PM	PH3 valve closed
2/6/2013	3:22:45 PM	SiCl4 pre valve closed
2/6/2013	3:22:45 PM	SiCl4 post valve closed
2/6/2013	3:22:45 PM	Main Vac valve closed
2/6/2013	3:22:45 PM	Bypass valve closed
2/6/2013	3:22:45 PM	H2 valve opened
2/6/2013	3:22:45 PM	Bubbler valve opened
2/6/2013	3:22:45 PM	Helium MFC set to  0.000000
2/6/2013	3:22:45 PM	H2 MFC set to  500.000000
2/6/2013	3:22:45 PM	BCl3 MFC set to  0.000000
2/6/2013	3:22:45 PM	PH3 MFC set to  0.000000
2/6/2013	3:22:45 PM	SiCl4 MFC set to  0.000000
2/6/2013	3:22:45 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	3:22:45 PM	Tube furnace set to 1000
2/6/2013	3:42:45 PM	Helium valve closed
2/6/2013	3:42:45 PM	BCl3 valve closed
2/6/2013	3:42:45 PM	Main Vac valve closed
2/6/2013	3:42:45 PM	Bypass valve closed
2/6/2013	3:42:45 PM	H2 valve opened
2/6/2013	3:42:45 PM	PH3 valve opened
2/6/2013	3:42:45 PM	SiCl4 pre valve opened
2/6/2013	3:42:45 PM	SiCl4 post valve opened
2/6/2013	3:42:45 PM	Bubbler valve opened
2/6/2013	3:42:45 PM	Helium MFC set to  0.000000
2/6/2013	3:42:45 PM	H2 MFC set to  450.000000
2/6/2013	3:42:45 PM	BCl3 MFC set to  0.000000
2/6/2013	3:42:45 PM	PH3 MFC set to  0.100000
2/6/2013	3:42:45 PM	SiCl4 MFC set to  50.000000
2/6/2013	3:42:45 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	3:42:46 PM	Tube furnace set to 1000
2/6/2013	4:22:46 PM	Helium valve closed
2/6/2013	4:22:46 PM	BCl3 valve closed
2/6/2013	4:22:46 PM	PH3 valve closed
2/6/2013	4:22:46 PM	SiCl4 pre valve closed
2/6/2013	4:22:46 PM	SiCl4 post valve closed
2/6/2013	4:22:46 PM	Main Vac valve closed
2/6/2013	4:22:46 PM	Bypass valve closed
2/6/2013	4:22:46 PM	H2 valve opened
2/6/2013	4:22:46 PM	Bubbler valve opened
2/6/2013	4:22:46 PM	Helium MFC set to  0.000000
2/6/2013	4:22:46 PM	H2 MFC set to  500.000000
2/6/2013	4:22:46 PM	BCl3 MFC set to  0.000000
2/6/2013	4:22:46 PM	PH3 MFC set to  0.000000
2/6/2013	4:22:46 PM	SiCl4 MFC set to  0.000000
2/6/2013	4:22:46 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	4:22:46 PM	Tube furnace set to 950
2/6/2013	4:24:46 PM	Helium valve closed
2/6/2013	4:24:46 PM	BCl3 valve closed
2/6/2013	4:24:46 PM	PH3 valve closed
2/6/2013	4:24:46 PM	SiCl4 pre valve closed
2/6/2013	4:24:46 PM	SiCl4 post valve closed
2/6/2013	4:24:46 PM	Main Vac valve closed
2/6/2013	4:24:46 PM	Bypass valve closed
2/6/2013	4:24:46 PM	H2 valve opened
2/6/2013	4:24:46 PM	Bubbler valve opened
2/6/2013	4:24:46 PM	Helium MFC set to  0.000000
2/6/2013	4:24:46 PM	H2 MFC set to  500.000000
2/6/2013	4:24:46 PM	BCl3 MFC set to  0.000000
2/6/2013	4:24:46 PM	PH3 MFC set to  0.000000
2/6/2013	4:24:46 PM	SiCl4 MFC set to  0.000000
2/6/2013	4:24:46 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	4:24:46 PM	Tube furnace set to 900
2/6/2013	4:26:46 PM	Helium valve closed
2/6/2013	4:26:46 PM	BCl3 valve closed
2/6/2013	4:26:46 PM	PH3 valve closed
2/6/2013	4:26:46 PM	SiCl4 pre valve closed
2/6/2013	4:26:46 PM	SiCl4 post valve closed
2/6/2013	4:26:46 PM	Main Vac valve closed
2/6/2013	4:26:46 PM	Bypass valve closed
2/6/2013	4:26:46 PM	H2 valve opened
2/6/2013	4:26:46 PM	Bubbler valve opened
2/6/2013	4:26:46 PM	Helium MFC set to  0.000000
2/6/2013	4:26:46 PM	H2 MFC set to  500.000000
2/6/2013	4:26:46 PM	BCl3 MFC set to  0.000000
2/6/2013	4:26:46 PM	PH3 MFC set to  0.000000
2/6/2013	4:26:46 PM	SiCl4 MFC set to  0.000000
2/6/2013	4:26:46 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	4:26:46 PM	Tube furnace set to 850
2/6/2013	4:28:46 PM	H2 valve closed
2/6/2013	4:28:46 PM	BCl3 valve closed
2/6/2013	4:28:46 PM	PH3 valve closed
2/6/2013	4:28:46 PM	SiCl4 pre valve closed
2/6/2013	4:28:46 PM	SiCl4 post valve closed
2/6/2013	4:28:46 PM	Main Vac valve closed
2/6/2013	4:28:46 PM	Bypass valve closed
2/6/2013	4:28:46 PM	Helium valve opened
2/6/2013	4:28:46 PM	Bubbler valve opened
2/6/2013	4:28:46 PM	Helium MFC set to  500.000000
2/6/2013	4:28:46 PM	H2 MFC set to  0.000000
2/6/2013	4:28:46 PM	BCl3 MFC set to  0.000000
2/6/2013	4:28:46 PM	PH3 MFC set to  0.000000
2/6/2013	4:28:46 PM	SiCl4 MFC set to  0.000000
2/6/2013	4:28:46 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	4:28:46 PM	Tube furnace set to 800
2/6/2013	4:30:46 PM	H2 valve closed
2/6/2013	4:30:47 PM	BCl3 valve closed
2/6/2013	4:30:47 PM	PH3 valve closed
2/6/2013	4:30:47 PM	SiCl4 pre valve closed
2/6/2013	4:30:47 PM	SiCl4 post valve closed
2/6/2013	4:30:47 PM	Main Vac valve closed
2/6/2013	4:30:47 PM	Bypass valve closed
2/6/2013	4:30:47 PM	Helium valve opened
2/6/2013	4:30:47 PM	Bubbler valve opened
2/6/2013	4:30:47 PM	Helium MFC set to  500.000000
2/6/2013	4:30:47 PM	H2 MFC set to  0.000000
2/6/2013	4:30:47 PM	BCl3 MFC set to  0.000000
2/6/2013	4:30:47 PM	PH3 MFC set to  0.000000
2/6/2013	4:30:47 PM	SiCl4 MFC set to  0.000000
2/6/2013	4:30:47 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	4:30:47 PM	Tube furnace set to 750
2/6/2013	4:32:47 PM	H2 valve closed
2/6/2013	4:32:47 PM	BCl3 valve closed
2/6/2013	4:32:47 PM	PH3 valve closed
2/6/2013	4:32:47 PM	SiCl4 pre valve closed
2/6/2013	4:32:47 PM	SiCl4 post valve closed
2/6/2013	4:32:47 PM	Main Vac valve closed
2/6/2013	4:32:47 PM	Bypass valve closed
2/6/2013	4:32:47 PM	Helium valve opened
2/6/2013	4:32:47 PM	Bubbler valve opened
2/6/2013	4:32:47 PM	Helium MFC set to  500.000000
2/6/2013	4:32:47 PM	H2 MFC set to  0.000000
2/6/2013	4:32:47 PM	BCl3 MFC set to  0.000000
2/6/2013	4:32:47 PM	PH3 MFC set to  0.000000
2/6/2013	4:32:47 PM	SiCl4 MFC set to  0.000000
2/6/2013	4:32:47 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	4:32:47 PM	Tube furnace set to 0
2/6/2013	4:52:47 PM	Helium valve closed
2/6/2013	4:52:47 PM	H2 valve closed
2/6/2013	4:52:47 PM	BCl3 valve closed
2/6/2013	4:52:47 PM	PH3 valve closed
2/6/2013	4:52:47 PM	SiCl4 pre valve closed
2/6/2013	4:52:47 PM	SiCl4 post valve closed
2/6/2013	4:52:47 PM	Main Vac valve closed
2/6/2013	4:52:47 PM	Bypass valve closed
2/6/2013	4:52:47 PM	Bubbler valve closed
2/6/2013	4:52:47 PM	Helium MFC set to  0.000000
2/6/2013	4:52:47 PM	H2 MFC set to  0.000000
2/6/2013	4:52:47 PM	BCl3 MFC set to  0.000000
2/6/2013	4:52:47 PM	PH3 MFC set to  0.000000
2/6/2013	4:52:47 PM	SiCl4 MFC set to  0.000000
2/6/2013	4:52:47 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	4:52:47 PM	Tube furnace set to 0
2/6/2013	4:52:48 PM	Helium valve closed
2/6/2013	4:52:48 PM	H2 valve closed
2/6/2013	4:52:48 PM	BCl3 valve closed
2/6/2013	4:52:48 PM	PH3 valve closed
2/6/2013	4:52:48 PM	SiCl4 pre valve closed
2/6/2013	4:52:48 PM	SiCl4 post valve closed
2/6/2013	4:52:48 PM	Main Vac valve closed
2/6/2013	4:52:48 PM	Bubbler valve closed
2/6/2013	4:52:48 PM	Bypass valve opened
2/6/2013	4:52:48 PM	Helium MFC set to  0.000000
2/6/2013	4:52:48 PM	H2 MFC set to  0.000000
2/6/2013	4:52:48 PM	BCl3 MFC set to  0.000000
2/6/2013	4:52:48 PM	PH3 MFC set to  0.000000
2/6/2013	4:52:48 PM	SiCl4 MFC set to  0.000000
2/6/2013	4:52:48 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	4:52:48 PM	Tube furnace set to 0
2/6/2013	4:53:46 PM	Helium valve closed
2/6/2013	4:53:46 PM	H2 valve closed
2/6/2013	4:53:46 PM	BCl3 valve closed
2/6/2013	4:53:46 PM	PH3 valve closed
2/6/2013	4:53:46 PM	SiCl4 pre valve closed
2/6/2013	4:53:46 PM	SiCl4 post valve closed
2/6/2013	4:53:46 PM	Main Vac valve closed
2/6/2013	4:53:46 PM	Bubbler valve closed
2/6/2013	4:53:46 PM	Bypass valve opened
2/6/2013	4:53:46 PM	Helium MFC set to  0.000000
2/6/2013	4:53:46 PM	H2 MFC set to  0.000000
2/6/2013	4:53:46 PM	BCl3 MFC set to  0.000000
2/6/2013	4:53:46 PM	PH3 MFC set to  0.000000
2/6/2013	4:53:46 PM	SiCl4 MFC set to  0.000000
2/6/2013	4:53:46 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	4:53:46 PM	Tube furnace set to 0
2/6/2013	4:54:46 PM	Helium valve closed
2/6/2013	4:54:46 PM	H2 valve closed
2/6/2013	4:54:46 PM	BCl3 valve closed
2/6/2013	4:54:46 PM	PH3 valve closed
2/6/2013	4:54:46 PM	SiCl4 pre valve closed
2/6/2013	4:54:46 PM	SiCl4 post valve closed
2/6/2013	4:54:46 PM	Bypass valve closed
2/6/2013	4:54:46 PM	Bubbler valve closed
2/6/2013	4:54:46 PM	Main Vac valve opened
2/6/2013	4:54:46 PM	Helium MFC set to  0.000000
2/6/2013	4:54:46 PM	H2 MFC set to  0.000000
2/6/2013	4:54:46 PM	BCl3 MFC set to  0.000000
2/6/2013	4:54:46 PM	PH3 MFC set to  0.000000
2/6/2013	4:54:46 PM	SiCl4 MFC set to  0.000000
2/6/2013	4:54:46 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	4:54:47 PM	Tube furnace set to 0
2/6/2013	4:54:48 PM	Run finished at 4:54 PM
2/6/2013	5:06:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/6/2013	5:06:48 PM	Recipe started at 5:06 PM
2/6/2013	5:06:48 PM	Helium valve closed
2/6/2013	5:06:48 PM	H2 valve closed
2/6/2013	5:06:48 PM	BCl3 valve closed
2/6/2013	5:06:48 PM	PH3 valve closed
2/6/2013	5:06:48 PM	SiCl4 pre valve closed
2/6/2013	5:06:48 PM	SiCl4 post valve closed
2/6/2013	5:06:48 PM	Main Vac valve closed
2/6/2013	5:06:48 PM	Bypass valve closed
2/6/2013	5:06:48 PM	Bubbler valve closed
2/6/2013	5:06:48 PM	Helium MFC set to  0.000000
2/6/2013	5:06:48 PM	H2 MFC set to  0.000000
2/6/2013	5:06:48 PM	BCl3 MFC set to  0.000000
2/6/2013	5:06:48 PM	PH3 MFC set to  0.000000
2/6/2013	5:06:48 PM	SiCl4 MFC set to  0.000000
2/6/2013	5:06:48 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	5:06:48 PM	Tube furnace set to 0
2/6/2013	5:06:51 PM	H2 valve closed
2/6/2013	5:06:51 PM	BCl3 valve closed
2/6/2013	5:06:51 PM	PH3 valve closed
2/6/2013	5:06:51 PM	SiCl4 pre valve closed
2/6/2013	5:06:51 PM	SiCl4 post valve closed
2/6/2013	5:06:51 PM	Main Vac valve closed
2/6/2013	5:06:51 PM	Bypass valve closed
2/6/2013	5:06:51 PM	Bubbler valve closed
2/6/2013	5:06:51 PM	Helium valve opened
2/6/2013	5:06:51 PM	Helium MFC set to  500.000000
2/6/2013	5:06:51 PM	H2 MFC set to  0.000000
2/6/2013	5:06:51 PM	BCl3 MFC set to  0.000000
2/6/2013	5:06:51 PM	PH3 MFC set to  0.000000
2/6/2013	5:06:51 PM	SiCl4 MFC set to  0.000000
2/6/2013	5:06:51 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	5:06:52 PM	Tube furnace set to 0
2/6/2013	5:07:58 PM	Helium valve closed
2/6/2013	5:07:58 PM	H2 valve closed
2/6/2013	5:07:58 PM	BCl3 valve closed
2/6/2013	5:07:58 PM	PH3 valve closed
2/6/2013	5:07:58 PM	SiCl4 pre valve closed
2/6/2013	5:07:58 PM	SiCl4 post valve closed
2/6/2013	5:07:58 PM	Main Vac valve closed
2/6/2013	5:07:58 PM	Bypass valve closed
2/6/2013	5:07:58 PM	Bubbler valve closed
2/6/2013	5:07:58 PM	Helium MFC set to  0.000000
2/6/2013	5:07:58 PM	H2 MFC set to  0.000000
2/6/2013	5:07:58 PM	BCl3 MFC set to  0.000000
2/6/2013	5:07:58 PM	PH3 MFC set to  0.000000
2/6/2013	5:07:58 PM	SiCl4 MFC set to  0.000000
2/6/2013	5:07:58 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	5:07:58 PM	Tube furnace set to 0
2/6/2013	5:07:59 PM	Run finished at 5:07 PM
2/6/2013	5:07:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/6/2013	5:16:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/6/2013	5:16:17 PM	Recipe started at 5:16 PM
2/6/2013	5:16:17 PM	Helium valve closed
2/6/2013	5:16:17 PM	H2 valve closed
2/6/2013	5:16:17 PM	BCl3 valve closed
2/6/2013	5:16:17 PM	PH3 valve closed
2/6/2013	5:16:17 PM	SiCl4 pre valve closed
2/6/2013	5:16:17 PM	SiCl4 post valve closed
2/6/2013	5:16:17 PM	Main Vac valve closed
2/6/2013	5:16:17 PM	Bubbler valve closed
2/6/2013	5:16:17 PM	Bypass valve opened
2/6/2013	5:16:17 PM	Helium MFC set to  0.000000
2/6/2013	5:16:17 PM	H2 MFC set to  0.000000
2/6/2013	5:16:17 PM	BCl3 MFC set to  0.000000
2/6/2013	5:16:17 PM	PH3 MFC set to  0.000000
2/6/2013	5:16:17 PM	SiCl4 MFC set to  0.000000
2/6/2013	5:16:17 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	5:16:17 PM	Tube furnace set to 0
2/6/2013	5:17:34 PM	Helium valve closed
2/6/2013	5:17:34 PM	H2 valve closed
2/6/2013	5:17:34 PM	BCl3 valve closed
2/6/2013	5:17:34 PM	PH3 valve closed
2/6/2013	5:17:34 PM	SiCl4 pre valve closed
2/6/2013	5:17:34 PM	SiCl4 post valve closed
2/6/2013	5:17:34 PM	Main Vac valve closed
2/6/2013	5:17:34 PM	Bubbler valve closed
2/6/2013	5:17:34 PM	Bypass valve opened
2/6/2013	5:17:34 PM	Helium MFC set to  0.000000
2/6/2013	5:17:34 PM	H2 MFC set to  0.000000
2/6/2013	5:17:34 PM	BCl3 MFC set to  0.000000
2/6/2013	5:17:34 PM	PH3 MFC set to  0.000000
2/6/2013	5:17:34 PM	SiCl4 MFC set to  0.000000
2/6/2013	5:17:34 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	5:17:34 PM	Tube furnace set to 0
2/6/2013	5:18:34 PM	Helium valve closed
2/6/2013	5:18:34 PM	H2 valve closed
2/6/2013	5:18:34 PM	BCl3 valve closed
2/6/2013	5:18:34 PM	PH3 valve closed
2/6/2013	5:18:34 PM	SiCl4 pre valve closed
2/6/2013	5:18:34 PM	SiCl4 post valve closed
2/6/2013	5:18:34 PM	Bypass valve closed
2/6/2013	5:18:34 PM	Bubbler valve closed
2/6/2013	5:18:34 PM	Main Vac valve opened
2/6/2013	5:18:34 PM	Helium MFC set to  0.000000
2/6/2013	5:18:34 PM	H2 MFC set to  0.000000
2/6/2013	5:18:34 PM	BCl3 MFC set to  0.000000
2/6/2013	5:18:34 PM	PH3 MFC set to  0.000000
2/6/2013	5:18:34 PM	SiCl4 MFC set to  0.000000
2/6/2013	5:18:34 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	5:18:34 PM	Tube furnace set to 0
2/6/2013	5:18:35 PM	Run finished at 5:18 PM
2/6/2013	5:18:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/6/2013	5:21:52 PM	Recipe started at 5:21 PM
2/6/2013	5:21:52 PM	Helium valve closed
2/6/2013	5:21:52 PM	H2 valve closed
2/6/2013	5:21:52 PM	BCl3 valve closed
2/6/2013	5:21:52 PM	PH3 valve closed
2/6/2013	5:21:52 PM	SiCl4 pre valve closed
2/6/2013	5:21:52 PM	SiCl4 post valve closed
2/6/2013	5:21:52 PM	Bypass valve closed
2/6/2013	5:21:52 PM	Bubbler valve closed
2/6/2013	5:21:52 PM	Main Vac valve opened
2/6/2013	5:21:52 PM	Helium MFC set to  0.000000
2/6/2013	5:21:52 PM	H2 MFC set to  0.000000
2/6/2013	5:21:52 PM	BCl3 MFC set to  0.000000
2/6/2013	5:21:52 PM	PH3 MFC set to  0.000000
2/6/2013	5:21:52 PM	SiCl4 MFC set to  0.000000
2/6/2013	5:21:52 PM	Bypass solenoid MFC set to  0.000000
2/6/2013	5:21:53 PM	Tube furnace set to 0
